Nano embossing press
An embossing machine and nanotechnology, applied in the direction of optomechanical equipment, optics, instruments, etc., can solve problems such as uneven pressure distribution, product defects, graphic deformation, etc., and achieve the effect of ensuring flatness, low cost, and press-in balance
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[0016] The present invention will be further described below in conjunction with the accompanying drawings.
[0017] Such as figure 1 The nanoimprinting machine shown includes an ultraviolet light source 1, a vacuum chamber 2, a pressure plate 3, a stage 4, a heating plate 5, a leveling device 6, and a high-pressure chamber 7; the high-pressure chamber 7 is installed in the vacuum chamber 2. The inner bottom and the high-pressure chamber 7 are connected with the leveling device 6, the heating plate 5 and the stage 4 in sequence through the rotating shaft 8. The upper end of the stage 4 is provided with a pressure plate 3;
[0018] The use steps of the present invention include:
[0019] a) Place the sample to be imprinted on the stage 4;
[0020] b) Vacuumize the vacuum chamber 2;
[0021] c) Pressure is added to the high-pressure chamber 7, and under the action of the leveling device 6, the sample is evenly pressed on the pressure-bearing plate 3;
[0022] d) The heating ...
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