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Cleaning device and cleaning method

A washing device and washing liquid technology, which is applied in the direction of chemical instruments and methods, spraying devices, cleaning methods and appliances, etc., can solve the problems of coating defects, affecting the discharge of coating liquid, etc., and achieve the effect of low-cost structure

Active Publication Date: 2014-01-15
TORAY ENG CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] If the coating operation by this coating device is carried out continuously for a long time, the cured product of the coating liquid or the sticky matter called foreign matter mixed in the coating liquid adheres to the front end of the lip and the surface forming the lip, etc., these Adhesives affect the discharge of the coating liquid, and there is a possibility of coating defects

Method used

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  • Cleaning device and cleaning method
  • Cleaning device and cleaning method

Examples

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Embodiment Construction

[0069] Embodiments of the present invention are described with reference to the drawings.

[0070] figure 1 It is a schematic diagram of a coating device using the cleaning device of the present invention. The coating device 1 includes: a coating unit 2 for coating the coating liquid on the substrate W; a transport unit 3 for transporting the substrate W; and a washing device 4 of the present invention for washing the lip surface 23 described later.

[0071] The coating unit 2 includes a nozzle 21 inside which has a slit whose longitudinal direction is the direction perpendicular to the transport direction of the substrate W transported by the transport unit 3 . In addition, a lip 22 is provided on the lower portion of the head 21 .

[0072] as explained later image 3 As shown in (a), the lip 22 has a shape protruding from the pipe head 21 to the downward with a pointed mouth shape, and the lip 22 has two inclined lip surfaces 23 ( image 3 (a) shows the lip surface 23a a...

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Abstract

The invention provides a cleaning device and a cleaning method which can forcefully remove adhesive matter on a mouth and is low in cost. The cleaning device (4) comprising a cleaning unit (5), and a cleaning solution supply mouth (14) which supplies a cleaning solution for cleaning a mouth surface (23), the mouth surface is cleaned through a moving device (6) while the cleaning unit and the cleaning solution supply mouth move towards a long dimension direction of the mouth surface, the cleaning unit comprises an ultrasonic vibrating part (11) on which an ultrasonic vibrator (15) is mounted and opposite grooves are formed (13), by enabling the opposite grooves to approach the mouth surface, and supplying the cleaning solution from the cleaning solution supply mouth to a gap between the opposite grooves and the mouth surface, a dipping part (19) is formed, under such a state, partial cleaning of the mouth surface is performed by generating ultrasonic wave vibration by the ultrasonic wave vibrating part, and by enabling the cleaning unit and the cleaning solution supply mouth to move towards the long dimension direction, the mouth surface is cleaned along the long dimension direction..

Description

technical field [0001] The present invention relates to a cleaning device for cleaning a lip of a nozzle for discharging a coating liquid to a substrate. Background technique [0002] Flat panel displays such as liquid crystal displays and solar cell panels use substrates on which pixels, circuit patterns, etc. are formed, and such substrates are manufactured by, for example, photolithography after applying a resist solution (coating solution). In addition, as an apparatus for applying a coating liquid to a substrate, there is known a coating apparatus having a nozzle in which a slit is formed. In addition, a protruding portion called a lip is formed on the lower portion of the head, and the above-mentioned slit is opened at the front end of the lip. With this coating device, a film of the coating liquid can be formed on the surface of the substrate by discharging the coating liquid from the opening at the tip of the lip while moving the nozzle horizontally with respect to ...

Claims

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Application Information

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IPC IPC(8): B05B15/02B05C11/10B05C5/00
CPCB05C5/0254B05B15/55B06B1/00B06B2201/71B08B3/06B08B3/12B08B11/00
Inventor 堀内展雄
Owner TORAY ENG CO LTD
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