Tiny gas sensor of laminated structure and preparation method of micro-gas sensor

Abstract

The invention relates to a micro-gas sensor of a laminated structure and a preparation method of the micro-gas sensor, and belongs to gas sensors and preparation method thereof. The gas sensor comprises a single-chip gas micro-reactor and a single-chip temperature detector, and the single-chip gas micro-reactor and the single-chip temperature detector are processed by MEMS (micro electro mechanical systems) technology and form the micro-gas sensor of the integral laminated structure through bonding. The single-chip gas micro-reactor independently heats a catalyst carrier, the single-chip temperature detector independently detects temperature rise of the single-chip gas micro-reactor due to gas catalytic combustion reaction and is not influenced by voltage or current on the single-chip gas micro-reactor during measuring, and the single-chip gas micro-reactor and the single-chip temperature detector are not electrically connected and independent to each other. The preparing process of the micro-gas sensor is compatible with CMOS (complementary metal oxide semiconductors) process. The sensor can respectively and independently regulate the single-chip gas micro-reactor and the single-chip temperature detector, and therefore, the sensor can have various operating modes, is simple in configuration, easy to operate, low in power consumption, high in sensitivity and stable in performance.

Description

technical field [0001] The invention relates to a micro-gas sensor with a laminated structure and a preparation method thereof based on micro-electromechanical system technology and packaging technology, in particular to a micro-gas sensor with a laminated structure and a preparation method thereof. Background technique [0002] At present, the catalytic combustion gas sensor based on traditional platinum wire heating is still widely used in coal mines, but its power consumption is relatively large, which cannot well meet the application requirements of the Internet of Things for low-power gas sensors. And other gas sensors also cannot adapt to the environment of high humidity in coal mines. Most of the existing reported gas sensors use metal platinum resistors as heating elements, and the platinum resistors are also used as temperature measuring elements. Since the heating element and the temperature measuring element are the same platinum resistance, many advanced technol...

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Problems solved by technology

[0003] The purpose of the present invention is to provide a micro-gas sensor with a stacked structure based on MEMS technology and packaging technology and its preparation method. The problem caused by the multiplexing of the platinum wire resistance element of the catalytic combustion gas sensor, that is, the problem that the same platinum wire resistance can be used as a heating element and a temperature measuring element at the same time, cannot be adjusted separately when controlling the temperature and measuring the temperature. The problem with improving sensitivity

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