Inductor
A technology of inductance and inductance coil, applied in the field of inductance, can solve the problems of increasing parasitic capacitance and reducing resonance frequency, etc., and achieve the effect of reducing parasitic capacitance, improving quality factor and increasing cost
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[0028] Such as image 3 Shown is a schematic cross-sectional structure diagram of an inductor according to Embodiment 1 of the present invention. Embodiment 1 of the present invention includes an inductor coil 105 and a substrate structure. The inductor coil 105 is a single-ended inductor, a differential inductor, a laminated inductor or a transformer. The inductance coil 105 is located above the substrate structure, and the inductance coil 105 and the substrate structure are separated by an insulating dielectric layer 107, and the insulating dielectric layer 107 in Embodiment 1 of the present invention is a silicon oxide layer .
[0029] The substrate structure includes:
[0030] A P-type semiconductor substrate 101.
[0031] An N-type epitaxial layer 102 formed on the semiconductor substrate 101 .
[0032] A plurality of P-type doped regions 103 in a strip structure, each of which is an ion implantation region defined by a photolithography process, the formation of each...
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