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Device and method for generating extreme ultraviolet tunable monochromatic coherent light source

A coherent light source, extreme ultraviolet technology, applied in optics, nonlinear optics, instruments, etc., to achieve the effect of promoting development, good coherence, and good light source coherence

Inactive Publication Date: 2013-09-18
WENZHOU UNIVERSITY
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Problems solved by technology

[0002] In the prior art, the monochromatic coherent light source is generally produced by the stimulated radiation of the working medium or the frequency doubling or difference frequency of the crystal. within) is difficult to generate using the above method

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  • Device and method for generating extreme ultraviolet tunable monochromatic coherent light source
  • Device and method for generating extreme ultraviolet tunable monochromatic coherent light source
  • Device and method for generating extreme ultraviolet tunable monochromatic coherent light source

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Embodiment Construction

[0029] Such as figure 1 As shown, the device for generating an extreme ultraviolet tunable monochromatic coherent light source of the present invention includes: a driving light source 1, a vacuum cavity 2, a vacuum pump 3, an air intake pipe 4, a visible light filter film 5; a focusing lens 6, a frequency doubling crystal 7, a delay Timing crystal 8, sum frequency crystal 9, 800nm ​​laser field 10, 400nm laser field 11, 267nm laser field 12, working gas flow 13 and extreme ultraviolet light source 14. The driving light source 1 is an 800nm ​​femtosecond laser, which generates a 400nm laser field 11 by driving a frequency doubling crystal 7, and drives a sum frequency crystal 9 to generate a 267nm laser field 12, and the synthesized multicolor field (including 800nm, 400nm and 267nm) passes through a delay crystal 8 to adjust the phase delay between them, the function of the focusing lens 6 is to focus the polychromatic laser field onto the working gas flow 13, thereby produci...

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Abstract

The invention provides a device and method for generating an extreme ultraviolet tunable monochromatic coherent light source, the method is characterized by utilizing interacting actions of 800 nm femtosecond laser and gas to generate ultraharmonics, tuning high order harmonic energy from the frequency comb to a specific degree through the macroscopic phase matching and atoms phase matching technology, and enabling the high order harmonic energy to output single high order harmonic (monochrome) in a specific degree. Furthermore, the specific high order harmonic can conduct tuning through the phase-matching technique, that is, the output wave length is adjustable. The extreme ultraviolet tunable monochromatic coherent light source generated by the device can be used in the fields of high precision detection for micro-nano structures, high precision holographic imaging and high precision carving and the like, and can also be used as an injecting source of a free electron laser, and the application range is extremely broad. And the device has the advantages that extreme ultraviolet can be output, monochrome tuning is realized and the coherence is good.

Description

technical field [0001] The present invention is a device and method for producing an extreme ultraviolet tunable monochromatic coherent light source (output wavelength tunable range 60nm-20nm, output bandwidth ~0.4nm), which utilizes the interaction between a multicolor laser field and a gas to generate a single high-order harmonic To achieve this, the light source is suitable for high-precision micro-nano structure detection, high-precision holographic imaging, high-precision engraving and other fields, and can also be used as an injection source for free electron lasers. Background technique [0002] In the prior art, the monochromatic coherent light source is generally produced by the stimulated radiation of the working medium or the frequency doubling or difference frequency of the crystal. within) is difficult to generate using the above method. However, extreme ultraviolet light sources have extremely important applications in modern production and scientific research...

Claims

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Application Information

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IPC IPC(8): G02F1/35
Inventor 尉鹏飞金清理黄超越柯震栋严林菲周让金丽芬金志燕郑崇伟
Owner WENZHOU UNIVERSITY
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