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Vernier effect based dual-micro-ring resonator optical biochemical sensing chip

A technology of micro-ring resonator and vernier effect, which is applied to the measurement of phase influence characteristics, etc., can solve the problems of narrow measurement range of a single system, low energy density of evanescent wave, and difficult detection, etc., and achieves easy mass production and fabrication Process standardization and excellent sensing performance

Active Publication Date: 2013-09-18
成都谱视科技有限公司
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Problems solved by technology

[0006] The purpose of the present invention is to solve the detection problem of some biochemical substances, on the basis of the mainstream optical biochemical sensor based on optical detection in the prior art, in order to further solve the problem of using evanescent wave detection principle and single system detection The low energy density of the evanescent wave leads to the difficulty of detection and the narrow measurement range and low sensitivity of a single system. A biochemical sensor chip based on the vernier effect optical resonant cavity is proposed.

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  • Vernier effect based dual-micro-ring resonator optical biochemical sensing chip
  • Vernier effect based dual-micro-ring resonator optical biochemical sensing chip
  • Vernier effect based dual-micro-ring resonator optical biochemical sensing chip

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Embodiment Construction

[0017] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0018] Such as Picture 1-1 with Figure 1-2 As shown, the dual microring resonator optical biochemical sensor chip based on the vernier effect in this embodiment includes an SOI layer composed of a silicon base layer 31, a silicon dioxide layer 32 and a single crystal silicon layer 33 that are sequentially stacked and bonded from bottom to top. The substrate, the single crystal silicon layer 33 of the SOI substrate includes a first optical resonant cavity 34 and a second optical resonant cavity 35, the first optical resonant cavity 34 and the second optical resonant cavity 35 have different free spectral ranges, The two are connected by optical coupling. In this embodiment, both the first optical resonant cavity and the second optical resonant cavity are microring resonant cavities. The first optical resonant cavity and the second optical r...

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Abstract

The invention provides a vernier effect based dual-micro-ring resonator optical biochemical sensing chip. The chip comprises an SOI (silicon on insulator) substrate consisting of a silicon base layer, a silicon dioxide layer and a mono-crystal layer which are overlapped and bonded from the bottom to the top sequentially; the mono-crystal silicon layer of the SOI substrate comprises two micro-ring resonators which are in optical coupling connection; and the micro-ring resonators are in overlapped shape in the space structure. Because the slit optical waveguide structure is introduced into the scheme and the slit waveguide can be used for limiting light as much as possible in a slit area to intensify the interaction between the light and a substance; the advantages that the light energy density in the slit space is far higher than that in an evanescent field, the interaction between the light and the substance can be stronger, and the detection sensitivity can be higher are achieved. The optical biochemical sensing chip is advantageous to implementation of miniaturization and SOI sensing system of the optical biochemical sensor under the condition of the same sensing performance.

Description

technical field [0001] The invention relates to the detection technology of specific chemical or biological substances such as gas molecules or biomolecules, specifically relates to the field of optical sensing technology, in particular to a biochemical sensor chip based on a vernier effect optical resonant cavity. Background technique [0002] A biochemical sensor is a combination of a bioactive material and a corresponding transducer, which is used to measure a specific chemical or biological substance. Since the determination of these chemical or biological substances is of great significance in environmental monitoring, disease monitoring and drug development, the research on biochemical sensors has become very important. At present, typical optical biochemical sensors can be mainly divided into two categories: fluorescent-labeled optical biochemical sensors and unlabeled optical biochemical sensors. According to relevant literature, although fluorescent-labeled optical ...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/41
Inventor 袁国慧王卓然高亮
Owner 成都谱视科技有限公司
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