Vernier effect based dual-micro-ring resonator optical biochemical sensing chip
A technology of micro-ring resonator and vernier effect, which is applied to the measurement of phase influence characteristics, etc., can solve the problems of narrow measurement range of a single system, low energy density of evanescent wave, and difficult detection, etc., and achieves easy mass production and fabrication Process standardization and excellent sensing performance
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[0017] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.
[0018] Such as Picture 1-1 with Figure 1-2 As shown, the dual microring resonator optical biochemical sensor chip based on the vernier effect in this embodiment includes an SOI layer composed of a silicon base layer 31, a silicon dioxide layer 32 and a single crystal silicon layer 33 that are sequentially stacked and bonded from bottom to top. The substrate, the single crystal silicon layer 33 of the SOI substrate includes a first optical resonant cavity 34 and a second optical resonant cavity 35, the first optical resonant cavity 34 and the second optical resonant cavity 35 have different free spectral ranges, The two are connected by optical coupling. In this embodiment, both the first optical resonant cavity and the second optical resonant cavity are microring resonant cavities. The first optical resonant cavity and the second optical r...
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