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Plasma coating equipment and air extraction process thereof

A technology of coating equipment and plasma, which is applied in the field of plasma coating equipment and its pumping process, can solve problems that affect the stability of the coating process, affect the quality of the coating product, and cannot operate efficiently, so as to achieve the stability of the coating process and the quality of the coating product Improve the quality, ensure the quality of coating products, and eliminate the effect of oil vapor pollution

Inactive Publication Date: 2013-09-11
苏州摩星真空科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The turbomolecular pumps (or diffusion pumps) used in traditional plasma coating equipment are all high vacuum pumps, which cannot operate efficiently during the coating stage, resulting in a reduction in pumping speed to 1 / 2~1 / 5 of the nominal value and a significant increase in energy consumption
[0004] 2. Diffusion pumps use oil vapor jets to pump air, resulting in serious oil vapor pollution. Turbomolecular pumps also have oil vapor pollution during the rough pumping stage, which affects the quality of coating products;
[0005] 3. The pumping speed of the turbomolecular pump (or diffusion pump) in the coating stage changes significantly with the pressure change, which affects the stability of the coating process

Method used

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  • Plasma coating equipment and air extraction process thereof
  • Plasma coating equipment and air extraction process thereof

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Effect test

Embodiment 1

[0031] Such as figure 1 and figure 2 As shown, the plasma coating equipment provided in Embodiment 1 of the present invention can be used for coating enhancement, decoration and adding new functions on the surface of workpieces to be coated. This plasma coating equipment comprises coating chamber 11, and coating chamber 11 is respectively connected with arc titanium pump 12, traction molecular pump 13 and roughing pump 14, and traction molecular pump 13 is connected with a backing pump 15, and coating chamber 11 and traction molecular pump A first vacuum valve 16 is provided between 13, a second vacuum valve 17 is provided between the traction molecular pump 13 and the backing pump 15, a third vacuum valve 18 is provided between the coating chamber 11 and the rough pump 14; wherein, Rough pump 14 is only used for rough pumping stage, arc titanium pump 12 is mainly used for fine pumping stage, traction molecular pump 13 and backing pump 15 are used for medium vacuum stage, ba...

Embodiment 2

[0051] The second embodiment is roughly the same as the first embodiment, except that the remaining space between the titanium target and the base of the cathode arc source in the second embodiment is provided with an elastic heat-conducting layer, and the elastic heat-conducting layer is preferably a metal material ( Such as copper or copper alloy, etc.), the elastic heat-conducting layer can also be made of non-metallic heat-conducting materials (such as graphite, carbon fiber, etc.). When the cooling water tank in the cathode arc source base is fed into the cooling water to cool the titanium target, the elastic heat conduction layer can increase the heat transfer speed between the titanium target and the cathode arc source base, which can further improve the cooling of the titanium target efficiency.

[0052] The second embodiment is especially suitable for plasma coating equipment with a short coating cycle.

Embodiment 3

[0054] The third embodiment is substantially the same as the first and second embodiments, the difference is that: in the coating stage, the arc titanium pump + traction molecular pump + backing pump are used to pump air in parallel.

[0055] The third embodiment is especially suitable for the occasion where there is no active gas in the working gas.

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Abstract

The invention discloses plasma coating equipment and an air extraction process thereof. An arc titanium pump, a molecular drag pump and a fore pump unit which are connected in series to extract air are adopted to substitute a turbo molecular pump (or diffusion pump) and a roots pump unit which are connected in series to extract air in the prior art. The arc titanium pump and the molecular drag pump are both pumps with low energy consumption, the arc titanium pump only needs to operate at a fine extraction stage, the operation time does not reach 1 / 3 of the whole air extraction time, the air extraction capability of the molecular drag pump at a coating stage is greatly higher than that of the turbo molecular pump (or diffusion pump), and the extraction speed of the molecular drag pump at the coating stage cannot be changed remarkably along with the change of pressure intensity, so that the air extraction energy consumption is greatly reduced, and the stability of a coating process and the quality of a coating product are improved; and in addition, the arc titanium pump, the molecular drag pump and the fore pump unit are free of oil vapor pollution, so that the oil vapor pollution caused by the traditional air extraction unit is also eliminated, and the quality of the coating product is further ensured.

Description

technical field [0001] The invention belongs to the technical field of plasma coating, and in particular relates to a plasma coating equipment and an air extraction process thereof. Background technique [0002] At present, plasma coating equipment generally adopts turbomolecular pump (or diffusion pump) + Roots pump series unit to pump air, which has the following disadvantages: [0003] 1. In the coating stage of the plasma coating equipment, Ar (or other working gas) needs to be injected into the coating chamber, and the pressure of the coating chamber is in the medium vacuum section (0.2~0.6 Pa). The turbomolecular pumps (or diffusion pumps) used in traditional plasma coating equipment are all high vacuum pumps, which cannot operate efficiently during the coating stage, resulting in a reduction in pumping speed to 1 / 2~1 / 5 of the nominal value and a significant increase in energy consumption. [0004] 2. Diffusion pumps use oil vapor jets to pump air, resulting in seriou...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/44C23C16/50C23C14/22C23C14/56
Inventor 储昕
Owner 苏州摩星真空科技有限公司
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