A planetary workpiece holder of a vacuum coating machine

Abstract

The invention discloses a planetary workpiece frame of a vacuum coating machine. The planetary workpiece frame of the vacuum coating machine comprises a power input mechanism, a workpiece frame outer support, a rotary cage planetary frame, rotary cage driving components, a rotary cage for containing a workpiece, a drive chain wheel and a power drive chain, wherein one end of the rotary cage planetary frame is supported by a rotary body fixed on the workpiece frame outer support, and the rotary center of the other end of the rotary cage planetary frame is supported by a rotary bearing fixed on the workpiece frame outer support; the rotary cage planetary frame is at least provided with more than three groups of the rotary cage driving components; each rotary cage driving component is provided with a rotary cage chain wheel; the power drive chain is meshed with the rotary cage chain wheels of the plurality of rotary cage driving components, and also is meshed with a chain wheel fixed on the workpiece frame outer support; a power input mechanism drives the rotary cage planetary frame to rotate. The planetary workpiece frame of the vacuum coating machine provided by the invention can effectively improve the working efficiency and the workpiece coating quality in the coating machine, can reduce the probability of mutual scratch and injury by being hit, and effectively meets the various technology requirements when in coating applying by a horizontal multi-target vacuum sputtering or ion membrane coating machine.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a planetary workpiece frame used in a horizontal multi-target vacuum sputtering or ion coating machine. Background technique [0002] Electroplating has been used in industry for a long time, but due to the serious environmental pollution caused by the discharge of three wastes in the electroplating process, a large amount of investment is required to treat it and it is difficult to cure it. It is the vertical multi-target vacuum sputtering or ion coating machine that has been developed rapidly. It is mainly used for rack plating. Its disadvantage is that it is more suitable for the coating of specific workpieces. Realize the effect of workpiece barrel plating, so the horizontal multi-target vacuum sputtering or ion coating machine is currently in the accelerated development, mainly used for barrel plating small workpieces, such as screws, nuts, polygonal sheets, rings, di...

AI Technical Summary

Problems solved by technology

[0002] Electroplating has been used in industry for a long time, but due to the serious environmental pollution caused by the discharge of three wastes in the electroplating process, a large amount of investment is required to treat it and it is difficult to cure it. It is the vertical multi-target vacuum sputtering or ion coating machine that has been developed rapidly. It is mainly used for rack plating. Its disadvantage is that it is more suitable for the coating of specific workpieces. Realize the effect of workpiece barrel plating, so the horizontal multi-target vacuum sputtering or ion coating machine is currently in the accelerated development, mainly used for barrel plating small workpieces, such as screws, nuts, polygonal sheets, rings, discs, various polygons Blocks and fragile workpieces, such as polygonal blocks of various shapes of magnetic materials, etc., horizontal multi-target vacuum sputtering or barrel plating technology of ion coating machines, are currently mostly in the stage of small batch trial production. Compared with industrial applications, there are still Many technical problems need to be overcome. To improve the production efficiency of the horizontal multi-target vacuum sputtering or ion coating machine, the number of arc targets and sputtering targets set in the coating machine should be as many as possible, so that the sputtering targets excited by the coating machine per unit time The coating ions should be as many as possible and be effectively sputtered onto the surface of the workpiece to be plated. The workpiece holder in the coating machine is required to ensure that all workpieces can achieve the barrel plating effect and the plating is even. The structure of the workpiece holder should avoid various arc targets and Due to the constraints of the sputtering target, the movement of the coating machine and the workpiece holder must be effectively transmitted, and the speed of the rotating cage can be changed according to the process requirements. The workpiece frame for industrial application of ion coating machine needs further research and development

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