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A method and device for realizing a vacuum high-precision window

A realization method and high-precision technology, applied in installation, optics, instruments, etc., can solve the problem of low surface shape accuracy, and achieve the effect of improving surface shape accuracy, simple structure, convenient disassembly and maintenance

Active Publication Date: 2016-01-20
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0007] The purpose of the present invention is to propose a method and device for realizing a vacuum high-precision window, so as to solve the problem of low surface accuracy of the vacuum window in the prior art

Method used

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  • A method and device for realizing a vacuum high-precision window
  • A method and device for realizing a vacuum high-precision window

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Experimental program
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Effect test

Embodiment 1

[0027] Embodiment 1: A method for realizing a vacuum high-precision window includes the following steps:

[0028] Step 1: using n pieces of window glass to form an optical window, and the n pieces of window glass are arranged horizontally and sequentially so that a closed cavity is formed between each adjacent two pieces of glass;

[0029] Step 2: vacuumize the multiple closed cavities formed in Step 1;

[0030] Step 3: Fill dry nitrogen into the multiple closed cavities that have been evacuated in step 2, so that the pressure in the multiple closed cavities increases sequentially.

[0031] The pressure in the plurality of closed cavities described in step 3 is increased successively to specifically meet the following requirements: one side of the first piece of window glass in contact with the vacuum is a vacuum, and one side is 1 / n atmospheric pressure; one side of the second piece of window glass It is 1 / n atmospheric pressure, and one side is 2 / n atmospheric pressure... O...

Embodiment 2

[0040] Embodiment 2: The difference between this embodiment and Embodiment 1 is that neon gas is filled in a plurality of vacuumized closed cavities.

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Abstract

A method and device for realizing a vacuum high-precision window belong to the technical field of optical-mechanical-electrical engineering, aiming at solving the problem of low surface precision of the vacuum window in the prior art. The present invention constructs a method for realizing a stepped pressure differential vacuum window. The mounting seat is fixed to the mounting interface by screws, and the window glass A is mounted on the mirror seat A through the pressure ring and the sealing ring A, the sealing ring B and the sealing ring C. , a plurality of flexible adjustment knobs A are evenly distributed on the circumference between the mirror base A and the mounting base; Sealing rings are used between the seats A for sealing installation, and a plurality of flexible adjustment knobs B are evenly distributed on the circumference between the mirror seat A and the mounting seat B; n pieces of window glass A or window glass B are used for continuous installation. The realization method and device of the high-precision vacuum window of the present invention are simple in operation, high in surface shape precision, simple in structure, and convenient for disassembly and maintenance.

Description

technical field [0001] The invention belongs to the technical field of optical-mechanical-electrical engineering, and in particular relates to a method and a device for realizing a vacuum high-precision window. Background technique [0002] The main feature of the vacuum high-precision window is that one side is in a vacuum environment and the other is in an atmospheric environment. Therefore, on the basis of ensuring good and reliable sealing of the window, it should also ensure that the surface shape accuracy of the optical window under atmospheric pressure meets the requirements of the system. Application requirements; vacuum windows are widely used in optical equipment and its detection equipment, especially in infrared lenses, vacuum coating machines, vacuum detection tanks, vacuum state collimator and other equipment, in high-precision optical detection, optical imaging systems Among them, the vacuum window will serve as a unit component of the optical system and parti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B7/00
Inventor 杨飞陈宝刚王富国张丽敏明名
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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