Zinc oxide sintered compact, sputtering target, and zinc oxide thin film
A zinc oxide film and sputtering target technology, applied in the field of sputtering targets, can solve the problem of easy cracking of the target, achieve high transmittance, suppress cracking, and improve productivity.
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Embodiment 1）
[0126] Commercially available zinc oxide powder and zirconia powder satisfying JIS 1 standard were dry-mixed for 16 hours in a 10 L nylon kettle using resin balls with iron cores having a diameter of 15 mm by a rotary ball mill. Thus, 2000 g of mixed powder having a zirconium content of 45 ppm was obtained. Next, the particle size of the mixed powder was adjusted using a 500 μm sieve to finally obtain about 1990 g of the mixed powder. Table 1 shows the physical properties of the powder after particle size adjustment.
[0127] Put 600g of the obtained powder into a 150mmφ metal mold, and use 300kgf / cm 2 (29.42 MPa) was press-formed to obtain a disc-shaped compact. A total of 3 molded bodies were produced in the same manner. 3 pieces of molded body at 3000kgf / cm 2 (294.2MPa) CIP treatment was implemented.
[0128] The molded body was heated up to 500°C at a rate of 50°C / h, and from 500°C to 1100°C at a rate of 20°C / h. After keeping at the calcination temperature of 1100° C...
Embodiment 2）
[0143] A compact was produced in the same manner as in Example 1 except that the mixing ratio of the zinc oxide powder and the zirconia powder was changed so that the content of zirconium was 20 ppm, 45 ppm, and 1000 ppm. Three types of molded bodies (numbers 2, 3, and 4 in Table 1) having different zirconium contents were prepared respectively. Table 1 shows the physical properties of the mixed powder after particle size adjustment.
[0144] The molded body was heated up to 500°C at a heating rate of 50°C / h, from 500°C to 1100°C at a heating rate of 20°C / h, and kept at a firing temperature of 1100°C for 3 hours. Then, the temperature was lowered at a cooling rate of 100° C. / h to obtain a zinc oxide sintered body. Baking was carried out under the condition of gas flow parameter = 1.8 in a nitrogen atmosphere. The firing conditions are shown in Table 2. As shown in Table 2, the success rate up to firing was 100% in all the samples of Nos. 2 to 4. In addition, the physical p...
Embodiment 3）
[0158] 15 kg of commercially available zinc oxide powder satisfying JIS 1 standard was mixed with pure water to form a slurry. Dispersion treatment was performed with a wet bead mill device in a state where the concentration of the zinc oxide powder in the slurry was 50% by weight. The container of the device was made of zirconia, and 0.3 mm zirconia beads were also used as beads.
[0159] The slurry treated by the wet bead mill device was collected and spray granulated. Since the addition amount of zirconium can be increased by prolonging the pulverization time in the wet bead mill apparatus, three types of powders having different zirconium contents were prepared by changing the pulverization time. The contents of zirconium in the prepared powders were 15 ppm, 33 ppm and 120 ppm, respectively. The physical properties of each powder are shown in Table 1, and a powder with high fluidity was obtained.
[0160] Put 600g of the obtained powder into a metal mold with a diameter...
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