Method for removing fingerprints and heavy oil stain of monocrystalline silicon wafers
A single crystal silicon wafer, fingerprint printing technology, applied in the field of texturing
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Embodiment 1
[0030] Weigh 0.5 g of lipase (enzyme activity ≥ 3000.0 U / g), dissolve it in 1 L of deionized water, add 8 g of sodium hydroxide, and wash at room temperature for 2 minutes. Rinse in deionized water. Put into the texturizing liquid that dissolves 1.3% (wt) sodium hydroxide, 3% isopropanol, 0.2% texturizing auxiliary agent, 1‰ lipase afterwards, temperature is controlled at 80 ℃, and texturizes 20 minutes.
Embodiment 2
[0032] Weigh 0.5 g of lipase (enzyme activity ≥ 3000.0 U / g), dissolve it in 1 L of deionized water, add 8 g of sodium hydroxide, and wash at room temperature for 2 minutes. Rinse in deionized water. Put into the texturing liquid that dissolves 1.3% (wt) sodium hydroxide, 3% isopropanol, 0.2% texturizing auxiliary agent, the lipase of 0.05‰ afterwards, temperature is controlled at 80 ℃, texturing 20 minutes.
Embodiment 3
[0034] Weigh 0.5 g of lipase (enzyme activity ≥ 3000.0 U / g), dissolve it in 1 L of deionized water, add 8 g of sodium hydroxide, and wash at room temperature for 2 minutes. Rinse in deionized water. Put into the texturing liquid that dissolves 1.3% (wt) sodium hydroxide, 3% isopropanol, 0.2% texturizing auxiliary agent, lipase of 10‰ afterwards, temperature is controlled at 80 ℃, texturing 20 minutes.
[0035] The method for removing fingerprints and heavy oil stains of single crystal silicon wafers of the present invention makes the suede surface of silicon wafers more uniform after cleaning with enzymes and making texture, which is beneficial to reduce the reflectivity of silicon wafers and the operation of subsequent processes, thereby improving the quality of fingerprints. and silicon wafers contaminated by heavy oil contamination.
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