Integrated grating piezoelectric modulation closed-loop high-precision acceleration micro-sensor

Abstract

The invention discloses an integrated grating piezoelectric modulation closed-loop high-precision acceleration micro-sensor which comprises a shell. A light source, a grating, a piezoelectric ceramic component and an MEMS (micro-electromechanical system) sensing mechanism are arranged in the shell sequentially along a light path, the MEMS sensing mechanism comprises a mass block and a cantilever beam connected with the mass block, and one surface, facing to the grating, of the mass block is a light reflecting surface. The acceleration micro-sensor is further provided with a photoelectric detector, a signal processing module, a first electromagnetic force generation device, a second electromagnetic force generation device and a current driving module, the photoelectric detector is used for detecting light intensity of interfering beams which are formed by interference of beams reflected by the grating and beams reflected by the light reflecting surface, the signal processing module is used for computing corresponding acceleration signals according of signals of the photoelectric detector, the first electromagnetic force generation device is fixed at the bottom of the mass block, the second electromagnetic force generation device is positioned in the shell and matched with the first electromagnetic force generation device, and the current driving module is used for transmitting current to the first electromagnetic force generation device and the second electromagnetic force generation device, and is connected with the signal processing module.

Description

technical field [0001] The invention relates to the field of micro-optoelectronic mechanical system (MOEMS) acceleration sensors, in particular to an integrated grating piezoelectric modulation closed-loop high-precision micro-acceleration sensor. Background technique [0002] Micro-machined acceleration sensor (Micro-machined Acceleration Sensor) is one of the representative devices of MEMS. It has the characteristics of small size, light weight and easy integration. It is the core device of the micro-inertial measurement combination. [0003] For example, the patent document with the patent publication number CN101788570A discloses a sandwich optical micro-mechanical acceleration sensor and a method thereof. It includes: laser light source, beam splitting prism, first photodetector, first silicon substrate, second silicon substrate, first subwavelength grating, elastic beam, displacement actuator, second photodetector, proof mass, second subwavelength wavelength grating e...

AI Technical Summary

Problems solved by technology

[0007] The measurement range of the micro-optical acceleration sensor in the above-mentioned patent is small, and the mass block needs to return to the initial position after the mass shifts. When the external acceleration is constantly changing, the accuracy of the measurement acceleration is poor, and the ability to resist the interference of the external environment is poor.

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