A vacuum ultraviolet spectrum irradiance calibration method and system
A technology of vacuum ultraviolet light and ultraviolet spectrum, which is applied in the field of vacuum ultraviolet spectral irradiance calibration method and system, and can solve the problem of high cost of vacuum ultraviolet spectral irradiance calibration
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[0027] The following description will enable any person skilled in the art to utilize the present invention. The descriptions provided in the specific embodiments and applications are examples only. Various extensions and combinations of the embodiments described herein will be apparent to those skilled in the art, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the invention . Thus, the present invention is not limited to the embodiments shown, but the present invention covers the widest scope consistent with the principles and features shown herein.
[0028] figure 1 A flow chart of a vacuum ultraviolet spectral irradiance calibration method according to an embodiment of the present invention is given.
[0029] Including step 101, obtaining the ultraviolet spectral radiance L(λ) of the ultraviolet light source in the 115nm-400nm band range;
[0030] Wherein, as an embodiment of ...
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