Accuracy compensation method of coaxial macro-micro composite linear motion platform device
A technology of linear motion and platform device, which is applied to other manufacturing equipment/tools, large fixed members, metal processing machinery parts, etc., can solve the problems of high cost of motion platform device, large displacement amplitude of macro-motion platform, long time of stabilization process, etc. problem, to achieve the effect of improving the selection range, simple structure and low cost
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[0023] The overall structure schematic diagram of the present invention is as figure 1 As shown, the coaxial macro-micro compound linear motion platform device of the present invention includes a macro motion device, a micro motion device, a control device and a position detection device, wherein the macro motion device includes a servo driver 1, a linear drive module, and a linear guide rail 2 , the base 4 and the macro-motion working platform 5, the servo drive 1 is connected with the linear guide rail 2 through the linear drive module, the linear guide rail 2 is installed on the base 4, the macro-motion working platform 5 is installed on the linear guide rail 2, and the micro-motion device includes a high Precision micro-motion driver and flexible hinge amplification mechanism. The flexible hinge amplification mechanism includes a flexible hinge 8, a micro-motion working platform 9, and a frame 10, wherein the flexible hinge 8 is installed on the frame 10, and the micro-moti...
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