One-direction torsion and high-balance variable optical attenuator and preparation method thereof
A technology of optical attenuator and attenuator, which is applied in the direction of instruments, optics, optical components, etc., can solve problems such as difficult linear control, structural asymmetry, easy imbalance, etc., and achieve high processing accuracy, improved reliability, and high reliability Effect
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[0026] The technical solution of the present invention will be described in further detail below in conjunction with the accompanying drawings.
[0027] Such as Figure 1 to Figure 3 As shown, the unidirectional twisted high-balance variable optical attenuator of the present invention includes a substrate 1 with a cavity on the upper part, a fixed comb unit 4 fixedly connected in the cavity of the substrate 1, and a fixed comb unit 4 located above the substrate 1. The two active electrode areas 2, the micromirror 3, the active comb unit 5 and two struts 6. A first silicon dioxide insulating layer 8 is provided between the active electrode region 2 and the substrate 1 . The first silicon dioxide insulating layer 8 is fixedly connected between the active electrode region 2 and the substrate 1 . That is to say, both active electrode regions 2 are isolated from the substrate 1 by a first silicon dioxide insulating layer 8 . One ends of the two struts 6 are fixedly connected wit...
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