Micro-electromechanical systems (MEMS) Doppler velocimetry method and device based on embedded twin-core photonic crystal fiber (PCF)
A Doppler velocity measurement and embedded technology, applied in the field of Doppler velocity measurement methods and devices, can solve the problems of low measurement accuracy, small control body, and difficulty in miniaturization, and achieve simplified incident unit, high-precision flow velocity measurement, Effect of system cost reduction
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[0027] The present invention will be described in detail below in conjunction with the accompanying drawings and the best implementation.
[0028] The inventive method step is as follows:
[0029] (1) Embed the dual-core photonic crystal fiber into the MEMS, so that the exit end face of the photonic crystal fiber is flush with the wall of the microchannel in the MEMS; (2) Adjust the dual-core photonic crystal fiber to obtain coherent light, so that the dual-core photonic crystal fiber The dual-core outgoing light is coherent to form clear and equally spaced interference fringes; (3) Adjust the dual-core photonic crystal fiber so that the direction of the formed interference fringes is perpendicular to the axis of the microchannel; (4) Analyze the interference fringe image by imaging the interference fringes Obtain the light intensity distribution diagram that changes with the fringe spacing; (5) Use the ruler to calibrate the fringe spacing to obtain the spacing of the interfe...
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