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Micro-electromechanical systems (MEMS) Doppler velocimetry method and device based on embedded twin-core photonic crystal fiber (PCF)

A Doppler velocity measurement and embedded technology, applied in the field of Doppler velocity measurement methods and devices, can solve the problems of low measurement accuracy, small control body, and difficulty in miniaturization, and achieve simplified incident unit, high-precision flow velocity measurement, Effect of system cost reduction

Active Publication Date: 2014-11-05
HANGZHOU DIANZI UNIV
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  • Abstract
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  • Claims
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Problems solved by technology

[0005] In order to overcome the shortcomings of the current laser Doppler velocimetry device, which is not easy to miniaturize, the control body is small and the measurement accuracy is not high.

Method used

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  • Micro-electromechanical systems (MEMS) Doppler velocimetry method and device based on embedded twin-core photonic crystal fiber (PCF)
  • Micro-electromechanical systems (MEMS) Doppler velocimetry method and device based on embedded twin-core photonic crystal fiber (PCF)
  • Micro-electromechanical systems (MEMS) Doppler velocimetry method and device based on embedded twin-core photonic crystal fiber (PCF)

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Embodiment Construction

[0027] The present invention will be described in detail below in conjunction with the accompanying drawings and the best implementation.

[0028] The inventive method step is as follows:

[0029] (1) Embed the dual-core photonic crystal fiber into the MEMS, so that the exit end face of the photonic crystal fiber is flush with the wall of the microchannel in the MEMS; (2) Adjust the dual-core photonic crystal fiber to obtain coherent light, so that the dual-core photonic crystal fiber The dual-core outgoing light is coherent to form clear and equally spaced interference fringes; (3) Adjust the dual-core photonic crystal fiber so that the direction of the formed interference fringes is perpendicular to the axis of the microchannel; (4) Analyze the interference fringe image by imaging the interference fringes Obtain the light intensity distribution diagram that changes with the fringe spacing; (5) Use the ruler to calibrate the fringe spacing to obtain the spacing of the interfe...

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Abstract

The invention relates to a micro-electromechanical systems (MEMS) Doppler velocimetry method and a device based on an embedded twin-core photonic crystal fiber (PCF). The method adopts the embedded twin-core photonic crystal fiber to realize a measurement of the speed of a particle in a microchannel o f the MEMS. Two coherent lights can be gained by taking advantage of two lead fiber cores of the twin-core PCF to realize beam path propagation and be capable of taking the place of a traditional beam path way which is characterized in that two paths of the traditional beam path way are separated, enabling a measuring probe and a device to realize micromation. The instability of the device and the interference from a bias light can be removed by the way of embedding the twin-core PCF into a MEMS chip. The larger volume of an interference control body can be gained due to the fact that a divergence angle of the light beam of an outgoing fiber end face is larger. The method has the advantages of magnifying a measuring field and improving the range of the measuring field.

Description

technical field [0001] The invention belongs to the technical field of microfluid velocity measurement, and relates to a Doppler velocity measurement method and device based on a double-core photonic crystal fiber. Background technique [0002] At present, there are three common detection modes in the laser velocimetry system, which are reference light mode, single beam-double scattering mode and double beam-double scattering mode. The measurement results of the dual-beam-double-scattering mode are not affected by the direction of reception, as it is widely used. Usually, most of the measuring devices with double-beam-double-scattering mode use a spectroscopic mirror to split the beam and a plane mirror to form two beams of light, and the two beams of light that meet the interference conditions produce an interference phenomenon. However, it is very difficult to form the interference field, and it is difficult for the object to be measured to pass through the interference f...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P5/26
Inventor 黄雪峰李盛姬王关晴刘彦罗丹温正城丁宁徐江荣
Owner HANGZHOU DIANZI UNIV
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