Plasma apparatus for the abating emissions of per-fluoro compounds and plasma vortex reactor for making the plasma apparatus
A plasma and processing device technology, applied in the field of plasma processing devices and vortex plasma reactors, can solve the problems of destroying perfluorinated waste gas, particulate matter pollution of pipelines and downstream equipment, and the impact of wet scrubber 150 cleaning performance, etc.
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[0058] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0059] Such as figure 2 Shown is a preferred embodiment of the plasma processing device for perfluorinated compounds of the present invention, and its principle and operation will be described below.
[0060] The plasma processing device of perfluoride of the present invention is a kind of utilization perfluoride waste gas to inject in the vortex plasma reactor 30 with tangential line, make it generate cyclone vortex, in the vortex plasma reactor 30 interior utilize The DC plasma torch 31 at one end pyrolyzes the perfluorinated waste gas, uses the Venturi scrubber 40 and the wet scrubber 60 to wash and lower the temperature to remove acid gas and particulate matter, and then uses the foam remover 70 to entrain the airflo...
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