Systems and methods for position control of a mechanical piston in a pump

Abstract

Embodiments of the presently disclosed systems and methods utilize brushless DC motors (BLDCMs) to drive single-stage or multi-stage pumps in pump systems for real-time, smooth motion and extremely precise and repeatable fluid movement and dispense volumes Perform position control, which is very useful in semiconductor manufacturing. The BLDCM can utilize position sensors for real-time position feedback to a processor implementing a custom field-oriented control scheme. Embodiments of the present invention are able to reduce heat generation by increasing and decreasing the frequency of operation of the BLDCM by tailoring the control scheme according to the criticality of the underlying function without compromising the precise position control of the dispense pump. The control scheme is capable of running the BLDCM at very low speeds while maintaining a constant speed, which allows the pump system to operate over a wide range of speeds with little variation, greatly increasing dispense performance and operating capacity.

Description

[0001] This divisional application is based on the application number 200680050665.7 (its international application number is PCT / US2006 / 044907), the application date is November 20, 2006, and the invention title is "A system for position control of a mechanical piston in a pump and Method" is a divisional application of the Chinese patent application. [0002] Cross References to Related Applications [0003] This application claims U.S. Provisional Patent Application Nos. 60 / 741660 (filed December 2, 2005, titled "SYSTEM AND METHOD FOR POSITIONCONTROL OF A MECHANICAL PISTON IN A PUMP") and 60 / 841725 (filed 2006 September 1, titled "SYSTEM ANDMETHOD FOR POSITION CONTROL OF A MECHANICALPISTON IN A PUMP"), so both documents are referenced herein. technical field [0004] The present invention generally relates to fluid pumps. In particular, embodiments of the invention relate to systems and methods for position control of mechanical pistons in motor-driven single-stage or mul...

AI Technical Summary

Problems solved by technology

These pressure spikes and subsequent pressure drops may damage the fluid (i.e. may adversely alter the physical characteristics of the fluid)

Additionally, pressure spikes may result in fluid pressure buildup, which may cause the dispense pump to dispense more fluid than intended, or to dispense fluid in a manner that has unfavorable dynamic characteristics

Also, since these problems are interrelated, sometimes fixing one problem can cause more problems and / or make things worse

[0008] Typically, pumping systems cannot satisfactorily control pressure changes during cycling

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