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Clean vacuum pumping system and pumping method for large space environment simulator

A technology of space environment simulation and vacuum pumping, which is applied in the direction of machines/engines, liquid variable displacement machinery, pump control, etc., can solve problems such as oil pollution, reduce pollution, improve reliability, and have good pollution control effects Effect

Inactive Publication Date: 2013-03-13
BEIJING INST OF SPACECRAFT ENVIRONMENT ENG
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Problems solved by technology

[0003] In order to solve the technical problem of oil pollution in the vacuum pumping system of the large-scale space environment simulator in the prior art, the present invention has been completed

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  • Clean vacuum pumping system and pumping method for large space environment simulator

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Embodiment Construction

[0017] The following introduces the specific implementation mode as the content of the present invention, and the content of the present invention will be further clarified through the specific implementation mode below. Of course, the following specific embodiments are described only to illustrate different aspects of the present invention, and should not be construed as limiting the scope of the present invention.

[0018] see figure 1 , the large-scale space environment simulator cleaning vacuum pumping system of the present invention includes a rough pumping system, a magnetic levitation molecular pump system and a cryopump system that are arranged on the large-scale space environment simulator and are respectively isolated by high vacuum valves. Among them, high-vacuum valves and vacuum measuring devices are respectively installed on the connection pipelines between the magnetic levitation molecular pump system and the cryogenic pump system and the large-scale space envir...

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Abstract

The invention discloses a clean vacuum pumping system and pumping method for a large space environment simulator. The clean vacuum pumping system comprises a rough pumping system, a magnetic suspension molecular pump system and a cryopump system, wherein the rough pumping system comprises a plurality of rough pumping units that are connected in parallel; each rough pumping unit consists of an oil-free dry pump and roots pump unit that is applied to an semiconductor industry; a PLC (programmable logic controller) and a host computer are adopted to automatically control and measure the overall process of vacuum pumping, so as to obtain and maintain high vacuum of the large space environment simulator; the magnetic suspension molecular pump system consists of magnetic suspension molecular pump, and oil-free dry pump and roots pump units that are applied to the semiconductor industry; the cryopump system adopts a cooling machine cryopump; and a preceding stage of the cryopump system adopts a unit consisting of a molecular pump and an oil-free dry pump and roots pump unit. The invention also discloses a corresponding pumping technology. As the oil-free vacuum pumping system and the reasonable pumping technology are adopted, the cleanness and high vacuum of the large space simulator are achieved.

Description

technical field [0001] The invention belongs to the technical field of space environment simulation, and in particular relates to a vacuum pumping method for a large-scale space environment simulator, which is used for obtaining the test vacuum of the large-scale space environment simulator. Background technique [0002] The large-scale space environment simulator mainly simulates the vacuum, cold and dark environments of space, and is used as ground equipment for thermal vacuum tests and thermal balance tests of spacecraft such as satellites and spacecraft. The vacuum environment is one of the important parameters of the space environment simulator test. The requirements for obtaining the vacuum of the space environment test of the spacecraft are clean and low pollution (24-hour cumulative pollution <1×10 -7 g / cm 2 ) high-vacuum environment, and the invented large-scale space environment simulator clean vacuum pumping technology was created to meet this need. At presen...

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Application Information

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IPC IPC(8): F04B41/06F04B49/02
Inventor 茹晓勤杨瑞洪董雷詹海洋李强王军伟古成
Owner BEIJING INST OF SPACECRAFT ENVIRONMENT ENG
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