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Automatic temperature control system for excimer laser

An excimer laser and temperature control system technology, applied in lasers, phonon exciters, laser parts, etc., can solve the problems of inability to accurately control gas temperature, long heating time of lasers, and no temperature control feedback system. The effect of energy conversion efficiency and energy stability, improving service life and reducing heat engine time

Active Publication Date: 2013-02-13
RAINBOW SOURCE LASER RSLASER
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Problems solved by technology

[0006] The traditional temperature control system for excimer lasers uses cooling water directly through the heat exchanger, without a temperature control feedback system, so it is impossible to accurately control the gas temperature in the cavity
And there is no cavity wall heating system, so the laser needs a long time to heat up

Method used

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  • Automatic temperature control system for excimer laser
  • Automatic temperature control system for excimer laser
  • Automatic temperature control system for excimer laser

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Embodiment Construction

[0028] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0029] A typical single-cavity discharge-pumped excimer laser is mainly composed of a solid-state switch (SSS), a magnetic compressor (MSG) and a discharge cavity (DC). Among them, the solid-state switch is mainly used to convert the DC voltage into electric pulses with high frequency and narrow pulse width, and the electric pulses are transmitted to the input end of the magnetic compressor. Magnetic compressors are used to increase the amplitude of the voltage pulse and decrease its width. The high voltage pulse at the output of the magnetic compressor enters the main electrode of the discharge chamber. The discharge chamber provides continuous fresh working gas, and receives high-voltage pulse disc...

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Abstract

The invention discloses an automatic temperature control system for an excimer laser. The excimer laser is provided with a first cavity module and a second cavity module which comprise discharge cavities, magnetic compressors and solid switches. The temperature control system comprises a cooling system for cooling the two magnetic compressors, a cavity temperature control system for controlling temperatures of the two discharge cavities and a cooling system for cooling the two solid switches. By means of the automatic temperature control system for the excimer laser, gas temperatures in the discharge cavities can be controlled automatically and accurately, and accordingly, the laser can be guaranteed to have high energy conversion efficiency and energy stability, the engine heating time can be reduced greatly, and the laser service life is increased.

Description

technical field [0001] The invention relates to an automatic temperature control system, which is suitable for gas lasers, especially for excimer lasers and their double-cavity structures. Background technique [0002] Excimer laser is a conventional gas laser for ultraviolet characteristic applications. It has the characteristics of short wavelength, high repetition frequency and scalable amplification. It is an excellent laser light source for lithography. [0003] Conventional discharge-pumped excimer lasers are designed with a single-cavity structure. With the development of lithography technology, the light source is required to have narrower spectral width (line width), higher repetition frequency and higher average power. However, the traditional single-cavity structure design is difficult to meet these three requirements at the same time. [0004] In order to effectively realize the narrowing of the spectral width and the enhancement of the laser power, the dual-ca...

Claims

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Application Information

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IPC IPC(8): H01S3/00H01S3/041G05D23/19
Inventor 王魁波丁金滨刘斌周翊王宇赵江山
Owner RAINBOW SOURCE LASER RSLASER
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