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Piezoelectric-electrohydraulic mixing driving arm and control method thereof

An electro-hydraulic hybrid and piezoelectric drive technology, applied in the field of drive arm, can solve the problems of only tens of microns and small stroke, and achieve the effect of large output power, wide operating frequency and reasonable design

Inactive Publication Date: 2013-01-23
NANJING INST OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The micro-positioning platform represented by the piezoelectric ceramic driver can achieve nanometer-level positioning accuracy, but the stroke is small, usually only tens of microns

Method used

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  • Piezoelectric-electrohydraulic mixing driving arm and control method thereof
  • Piezoelectric-electrohydraulic mixing driving arm and control method thereof

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Embodiment 1

[0027] according to figure 1 As shown in the schematic diagram of the structure of the present invention, the piezoelectric-electro-hydraulic hybrid driving arm of this embodiment can adopt the following specific product part models:

[0028] (i) Electro-hydraulic servo part:

[0029] Hydraulic pump 10: PVPC type axial piston pump of ATOS;

[0030] Hydraulic cylinder 8: B137CK series oil cylinder P / 10-32 / 22 / 500, stroke 500mm;

[0031] Three-position four-way electro-hydraulic servo valve 9: Rexroth four-way servo directional valve RC-29-564.

[0032] (ii) Piezoelectric drive part:

[0033] Piezoelectric driver 4: German PI piezoelectric ceramic driver P-845.60, rated output displacement 90um; built-in SGS precision displacement sensor, to achieve 1.8nm closed-loop control accuracy;

[0034] Power amplifier 2: E-505.00 power amplifier module of PI in Germany.

[0035] (iii) Detection part:

[0036] Grating sensor 7: MII4800 of Micro E Systems, with a resolution of 1 nm. ...

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Abstract

The invention discloses a piezoelectric-electrohydraulic mixing driving arm and a control method of the piezoelectric-electrohydraulic mixing driving arm, belonging to the technical field of a driving arm. The piezoelectric-electrohydraulic mixing driving arm comprises an industrial computer, a power amplifier, a grating sensor, a piezoelectric actuator, a connection rod and an output rod, wherein the piezoelectric-electrohydraulic mixing driving arm further comprises a hydraulic cylinder, a three-position four-way electrohydraulic servo valve, a hydraulic pump and an oil tank; the piezoelectric driver is fixed at the free end of a piston rod in horizontal direction in the cylinder; a displacement sensor is arranged in the piezoelectric actuator; the other end of the piezoelectric actuator is connected with the output rod; the scale grating of the grating sensor is fixedly arranged on the hydraulic cylinder; the indicating grating of the grating sensor is arranged on the output rod by the connection rod; the grating sensor and the piezoelectric actuator are connected with the industrial computer; and the industrial computer is connected with the displacement sensor by the power amplifier. With the adoption of the technical solution of the invention, the high precision positioning requirement of the driving arm can be effectively achieved, and meanwhile the technical requirements of modern precision machining and precision measurement are met.

Description

technical field [0001] The invention belongs to the technical field of drive arms, and more specifically relates to a large-scale nanoscale positioning drive arm using piezoelectric-electro-hydraulic hybrid servo drive. Background technique [0002] With the continuous development of modern science and technology, various fields such as aerospace technology, bioengineering, microelectronics engineering, nanoscience and technology have put forward higher requirements for the stroke and accuracy of positioning devices. For example, in the defense industry, a large number of The processing and measurement of complex free-form surface parts, and the processing of semiconductors and flat panel displays in industrial automation require large-scale, high-precision, fast-response, real-time and continuously adjustable precision positioning devices. Most of the current precision positioning devices are driven by rotary servo motors and driven by precision ball screws, or some of them...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F15B21/08
Inventor 许有熊朱松青韩亚丽陈茹雯刘娣郝飞
Owner NANJING INST OF TECH
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