Anti-explosion oil diffusion pump vacuum system and anti-explosion control method thereof

Abstract

The invention relates to an anti-explosion oil diffusion pump vacuum system and an anti-explosion control method of the vacuum system. The anti-explosion oil diffusion pump vacuum system comprises an oil diffusion pump system, wherein the oil diffusion pump system is provided with an oil diffusion pump, an air extraction opening of the oil diffusion pump is communicated with an air outlet of a vacuum chamber through a pipeline; the anti-explosion oil diffusion pump vacuum system further comprises a control system; the control system comprises a pressure detecting device which is arranged at a front-stage air exhaust pipeline of the oil diffusion pump, a temperature measuring device which is arranged inside the oil diffusion pump and which is used for detecting the oil temperature in real time, and a pressure measuring device for measuring the pressure inside the vacuum chamber; the control system is provided with a critical pressure Pq and an anti-explosion pressure Pfb; and the opening and closing of pump packages and valve groups in the oil diffusion pump system are controlled by the control system by acquiring real-time data measured by the pressure detecting device, the temperature measuring device and the pressure measuring device. According to the vacuum system, the oil temperature, the front stage pressure and the pressure of the vacuum chamber are monitored in real time through the control system, and are compared with the set critical pressure and the anti-explosion pressure, and corresponding measures are taken if a danger is detected, so that the oil diffusion pump is prevented against explosion.

Description

technical field [0001] The invention relates to the technical field of vacuum equipment, in particular to an explosion-proof oil diffusion pump vacuum system and an explosion-proof control method thereof. Background technique [0002] Oil diffusion pump vacuum technology has many advantages such as high pumping rate, simple structure, no mechanical transmission, no friction, and low selectivity to the pumped gas. It is widely used in industrial fields such as vacuum smelting, vacuum coating, atomic energy, and space simulation. In scientific and technological research, the oil diffusion pump vacuum system is an important vacuum obtaining system, and it is one of the most extensive and main tools for obtaining high vacuum at present, and plays an important role in scientific research and national economic development. [0003] The main performance indicators of the oil diffusion pump are related to the pump size, ultimate pressure, oil temperature, oil quality, etc. The basi...

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Problems solved by technology

But in the process of filling the vacuum chamber with atmosphere, if figure 2 As shown, when there is a foreign matter at A that blocks the sealing valve plate and causes the air inlet valve of the oil diffusion pump to be poorly sealed, the air will enter the vacuum chamber through the valve, and then enter the cavity of the oil diffusion pump, and the high temperature between the air and the oil diffusion pump will Oil is mixed. At this time, because the pumping capacity of the pump is generally very low, a large amount of incoming air cannot be evacuated. When the incoming air flow rate is large and the air volume in the pump chamber reaches a certain proportion, the possibility of explosion is very high.

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