PCM-based tunable metamaterial optical tweezers
A phase change material and metamaterial technology, applied in the field of tunable metamaterial optical tweezers
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Embodiment 1
[0019] First, a multilayer structure of N (N>=1) layers (metal layer 3-phase change material layer 4-metal layer 3-oxidation layer 5) 2 is formed on a glass substrate 1 by a material growth process, as shown in the attached figure 2 (a) shown.
[0020] Second, deposit SiO on the multilayer structure 2 2 film as a mask 6, as attached figure 2 (b) shown.
[0021] Then, the designed periodic hole matrix sample is transferred to the mask through the mask process, as shown in the attached figure 2 (c) shown. Among them, the structure design can adopt algorithms such as finite time domain difference method and finite element method. Then, through an etching process, a periodic hole matrix 7 is prepared on the 2 material, as shown in the attached figure 2 as shown in (d)
[0022] Finally, the mask 6 is removed to obtain the tunable metamaterial optical tweezers 8, as shown in the attached figure 2 (e) shown. Among them, the tunable metamaterial optical tweezers9 based on...
Embodiment 2
[0024] First, a multilayer structure of N (N>=1) layers (metal layer 3-phase change material layer 4-metal layer 3-oxidation layer 5) 2 is formed on a glass substrate 1 by a material growth process, as shown in the attached image 3 (a) shown.
[0025] Second, deposit SiO on the multilayer structure 2 2 film as a mask 6, as attached image 3 (b) shown.
[0026] Then, the designed periodic hole matrix sample is transferred to the mask through the mask process, as shown in the attached image 3 (c) shown. Among them, the structure design can adopt algorithms such as finite time domain difference method and finite element method.
[0027] Then, through an etching process, a periodic hole matrix 7 is prepared on the 2 material, as shown in the attached image 3 as shown in (d)
[0028] Finally, the mask 6 is removed, and the phase-change material 4 is injected into the hole matrix 7 to seal the holes to obtain a tunable metamaterial optical tweezers 8, as shown in the attach...
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