Heat collecting plate of solar heat collecting device
A heat collecting plate and heat collector technology, applied in the field of solar heat collectors
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[0016] The heat collecting plate of the solar heat collector of the present invention comprises a stainless steel base plate, on which a layer of aluminum nitride anti-infrared reflection film, aluminum oxynitride gradient absorbing film and aluminum oxide anti-reflection film are sequentially arranged.
[0017] The preparation process is as follows:
[0018] Sputtering deposition of aluminum nitride anti-infrared reflection film on stainless steel substrate, working pressure 0.2-1.5 Pa, reaction gas nitrogen volume 20-200Sccm; sputtering aluminum oxynitride gradient absorption film on anti-infrared reflection film, working pressure 0.2-0.8 Pa, reaction gas nitrogen, nitrogen and oxygen volume ratio 1:1~1:10, gas volume 60-150Sccm; sputtering aluminum oxide anti-reflection film deposited on aluminum oxynitride gradient absorption film, working pressure 0.2-0.8Pa, reaction gas The amount of oxygen is 30-200Sccm.
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