Spray head of MOCVD (metal organic chemical vapor deposition) equipment reactor and connection structure thereof
A sprinkler and reactor technology, applied in the sprinkler field, can solve the problems of scrapped sprinkler, economic loss, cooling water leakage, etc.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0026] The present invention will be further described below in conjunction with specific embodiment and accompanying drawing, set forth more details in the following description so as to fully understand the present invention, but the present invention can obviously be implemented in many other ways different from this description, Those skilled in the art can make similar promotions and deductions based on actual application situations without violating the connotation of the present invention, so the content of this specific embodiment should not limit the protection scope of the present invention.
[0027] Such as image 3 and Figure 5 As shown, the shower head of the MOCVD reactor in the embodiment of the present invention includes a shower assembly 1 and a top cover assembly 2 . The sprinkler assembly 1 comprises a bottom layer 11 , a middle layer 12 and a top layer 13 joined together. The top cover assembly 2 includes a top cover 21 .
[0028] image 3 The diagram ...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com