Spray head of MOCVD (metal organic chemical vapor deposition) equipment reactor and connection structure thereof

Abstract

The invention aims to provide a spray head of an MOCVD (metal organic chemical vapor deposition) equipment reactor and a connection structure thereof so as to reduce the adverse influence of welding a bottom layer and a middle layer on a bottom surface. The spray head comprises a spray component and a top cover component, wherein the top cover component comprises a top cover; the spray component comprises a bottom layer, a middle layer and a top layer which are connected together; a cooling water channel and a cooling water cavity are formed between the bottom layer and the middle layer; a V-group gas cavity is formed between the middle layer and the top layer; a III-group cavity is formed between the top layer and the top cover; the bottom layer is an inward-concave integral member which is provided with a bottom wall and a corral side wall protruding from the bottom; and the outer side surface of the middle layer is welded with the inner side surface of the corral side wall of the bottom layer.

Description

technical field [0001] The invention relates to a shower head, in particular, the invention relates to a shower head of a MOCVD equipment reactor. Background technique [0002] Metal-organic chemical vapor deposition equipment (MOCVD for short) uses organic compounds of group III and group II elements and hydrides of group V and group VI elements as crystal growth source materials, and conducts vapor phase epitaxy on the substrate by thermal decomposition reaction. Process equipment for growing thin-layer single crystal materials of various III-V, II-VI compound semiconductors and their multiple solid solutions. As the core component of MOCVD equipment, the shower head plays a decisive role in the design and manufacture of the whole machine. [0003] figure 1 A conventional shower head structure used in an existing MOCVD reactor is shown, including a bottom layer 101 , a middle layer 106 and a top cover 107 . The middle layer 103 is provided with group V gas channels 106,...

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Problems solved by technology

[0005] 2. In order to weld the bottom layer 101 and the middle layer 103, an annular weld 104 will inevitably be produced, which is located below the cooling water annular channel 105; working under high temperature for a long time, it is easy to produce cooling water leakage, and once this problem occurs , the sprinkler head can only be scrapped, resulting in huge economic losses

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