Micro-nano integrated processing technology based three-dimensional anti-drag micro-channel structure and preparation method thereof

Abstract

The invention discloses a micro-nano integrated processing technology based three-dimensional anti-drag micro-channel structure and a preparation method thereof, relating to the technical field of micromachining. The preparation method comprises the steps of: directly preparing a high density and high aspect ratio nano dimension cone array on each surface of a silicon-based micron dimension groove by utilizing DRIE (Deep Reactive Ion Etching) without mask optimization to increase a superficial area to volume ratio; and depositing a layer of fluoro-based polymer on the surface of the silicon-based micron dimension groove at the same time to reduce a surface energy and realize a surface structure with super-hydrophobic properties, thereby further realizing a true three-dimensional anti-drag micro-channel structure. The micro-nano integrated processing technology based three-dimensional anti-drag micro-channel structure, disclosed by the invention, has the advantages that: the high density and high aspect ratio nano dimension cone array can be produced without damaging the original micron dimension structure; 100% coverage of a nano forest for the micron dimension groove can be realized and a true three-dimensional anti-drag micro-channel is thereby realized. The micro-nano integrated processing technology based three-dimensional anti-drag micro-channel structure can improve the area to volume ratio thereof extremely and reduce the surface energy to enable the surface of the micro-channel to have the super-hydrophobic properties, thereby realizing an excellent anti-drag effect. The micro-nano integrated processing technology based three-dimensional anti-drag micro-channel structure has simple technology, low cost and easy industrialization.

Description

technical field [0001] The invention relates to the technical field of micro-processing, in particular to a three-dimensional drag-reducing micro-channel structure and a preparation method based on micro-nano integrated processing technology. Background technique [0002] Microelectromechanical system (MEMS) refers to micromechanical basic components including micromechanical sensors and actuators produced by micromachining technology, as well as micro energy sources and high-performance electronic integrated circuits produced by integrated circuit processing technology. Microelectromechanical devices, devices or systems. Since its emergence in the 1980s, as an emerging, high-tech multi-field interdisciplinary subject, MEMS has attracted extensive attention from researchers at home and abroad, and is known as a new technological revolution leading the development of the microelectronics industry in the new century. After nearly 30 to 40 years of development, MEMS has achiev...

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Problems solved by technology

[0005] In recent years, researchers have proposed a drag-reducing channel design based on surface modification of micro-nano dual-scale particles [Example: Lu Si, Chinese Science: Series G, 2010, 40: 916-924], which can achieve high-efficiency drag-reducing effects, However, the realization of the above-mentioned micro-nano dual-scale particle structure usually requires multi-step complex processes and high cost. More importantly, it is difficult to realize the drag-reducing structure on the sidewall and top surface of the groove, that is, it is impossible to realize the real three-dimensional drag-reducing microstructure. Runner

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