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Six-order continuous band-pass sigma-delta closed-loop control circuit for MEMS (micro-electromechanical system) gyroscope

A closed-loop control circuit and continuous belt technology, applied in general control systems, adaptive control, control/regulation systems, etc., can solve problems such as central mass block adsorption, system parameters are easily affected by external factors, and system implementation is difficult , to achieve the effect of improving the symmetry

Inactive Publication Date: 2012-08-01
NORTHWESTERN POLYTECHNICAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The analog closed-loop control circuit has the disadvantages that the system parameters are easily affected by external factors, and the electrostatic force of the feedback control is easy to be too large, causing the central mass to be adsorbed to the electrodes, and the system is difficult to implement.

Method used

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  • Six-order continuous band-pass sigma-delta closed-loop control circuit for MEMS (micro-electromechanical system) gyroscope
  • Six-order continuous band-pass sigma-delta closed-loop control circuit for MEMS (micro-electromechanical system) gyroscope
  • Six-order continuous band-pass sigma-delta closed-loop control circuit for MEMS (micro-electromechanical system) gyroscope

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Embodiment 1

[0016] The MEMS gyroscope aimed at in this embodiment is as figure 2 As shown, the drive and detection mode comb center capacitance C o =3.43e-13F, the resonant frequency f of the drive mode x =4.30KHz, the resonant frequency f of the detection mode y =4.33KHz, bandwidth BW=50Hz, m x = m y =2×10 -6 Kg.

[0017] The 6th-order continuous bandpass sigma-delta closed-loop control circuit of its detection mode refers to Figure 5, the whole circuit system consists of fully differential charge amplifier 5, high pass filter 6, diode 7, low pass filter 8, fully differential amplifier circuit 9, phase compensation circuit 10, resonant circuit 11, digital conversion circuit 12, analog switch 13, with pass filter 14, demodulator 15, and low-pass filter 16 are formed; First, the external drive voltage makes the gyroscope resonate on the drive mode, and the resonance displacement is x(t)=a 1 sin(ω x t+φ), where ω x =2πf x =2π·4300, when there is angular velocity Ω(t) input, due ...

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Abstract

The invention relates to a six-order continuous band-pass sigma-delta closed-loop control circuit for an MEMS (micro-electromechanical system) gyroscope, which belongs to the field of guide or control devices using Coriolis effect. The six-order continuous band-pass sigma-delta closed-loop control circuit comprises a charge amplifier 5, a high-pass filter 6, a diode 7, a low-pass filter 8, a fully-differential amplification circuit 9, a phase compensation circuit 10, a resonant circuit 11, a digital conversion 12, an analog switch 13, a band-pass filter 14, a demodulator 15 and a low-pass filter 16. The six-order continuous band-pass sigma-delta closed-loop control circuit for the MEMS gyroscope can eliminate influences of drive coupling signals on gyroscope detection signals, improve symmetry of two channels of fully-differential signals for detecting modality so as to eliminate asymmetric direct-current component, and further process outputted pulse width modulation digital signals b (t) to obtain and output simulation angular velocity signals omega (t).

Description

technical field [0001] The invention relates to a closed-loop control circuit for MEMS gyroscope detection mode, which belongs to the field of guidance or control devices utilizing the Coriolis effect. Background technique [0002] MEMS gyroscope is an important inertial sensor. Compared with traditional fiber optic gyroscopes and laser gyroscopes, it has the advantages of small size, light weight, low power consumption, and low cost. Therefore, inertial instruments implemented with MEMS gyroscopes are widely used for attitude and position information of various moving objects. Detection, especially military fields such as precision-guided weapons and unmanned aerial vehicles, has put forward a clear demand for high-precision miniature inertial sensors. However, MEMS gyroscopes usually need an additional control system to control them or compensate for errors, so as to improve accuracy. For example, the self-excited oscillation closed-loop control of the driving mode of th...

Claims

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Application Information

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IPC IPC(8): G05B13/00
Inventor 袁广民陈方常洪龙谢建兵苑伟政
Owner NORTHWESTERN POLYTECHNICAL UNIV
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