Cooling cavity transmission system in LPCVD (Low-Pressure Chemical Vapor Deposition) process

A transmission system and cooling cavity technology, applied in metal material coating processes, conveyors, manufacturing tools, etc., can solve problems such as increased glass substrate breakage, increased glass substrate breakage probability, glass breakage, etc., to improve stability, eliminate Local temperature changes are too drastic, eliminating the effect of deformation

Inactive Publication Date: 2012-07-25
HANERGY TECH
View PDF3 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At the same time, the deformation of the glass itself will also increase the probability of glass breakage. In the existing technology, during the cooling process of the glass, the change of the internal stress caused by the temperature change will also be superimposed on the deformation of the glass itself, which will cause the glass substrate in the cooling chamber. Increased chance of breakage during chamber cooling
The most important thing is that since the roller transmission device itself is a water cooling device, when the high-temperature glass is in contact with the roller device, it will cause a drastic change in the local temperature of the edge of the glass substrate, which will also increase the probability of the glass substrate being broken

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Cooling cavity transmission system in LPCVD (Low-Pressure Chemical Vapor Deposition) process
  • Cooling cavity transmission system in LPCVD (Low-Pressure Chemical Vapor Deposition) process
  • Cooling cavity transmission system in LPCVD (Low-Pressure Chemical Vapor Deposition) process

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] A cooling chamber delivery system in an LPCVD process, such as figure 2 , 3 Shown, comprise a group of transmission rollers 2, also comprise driven roller 5 and the transmission belt 3 driven by transmission roller 2, transmission roller 2 and driven roller 5 are respectively positioned at the two ends of transmission direction of transmission belt 3; Transmission belt 3 is One on each side, respectively erected on the driving roller 2 and the driven roller 5 on both sides of the cooling chamber, to ensure that the conveyor belt 3 can run at a constant speed, and then drive the glass to be transported at a uniform speed.

[0020] The conveying belt 3 is a belt resistant to a high temperature of 200°C, which can ensure that the contact between the edge of the glass and the belt will not reduce the service life of the belt. Simultaneously, because the conveyer belt 3 itself is a poor conductor of heat, it will not cause drastic changes in the local temperature of the gl...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention relates to a cooling cavity transmission system in LPCVD (Low-Pressure Chemical Vapor Deposition) process, in particular to a cooling cavity transmission system in LPCVD process, which can reduce the breakage rate of glass. The system comprises a group of driving rollers, as well as driven rollers and a transmitting belt driven by the driving rollers, wherein the driving rollers and the driven rollers are respectively positioned at two ends of the transmitting belt in transmitting direction. The system eliminates two factors causing glass breakage: self deformation of glass substrate and excessively severe local temperature change while the structure is simplified, lowers the breakage rate of glass in transmission process, improves the production stability and is easy to maintain.

Description

technical field [0001] The invention relates to a cooling cavity transmission system in an LPCVD process, in particular to a cooling cavity transmission system in an LPCVD process which reduces glass breakage rate. Background technique [0002] The future market development of photovoltaic applications, especially for use in grid-connected photovoltaic power plants, depends critically on the potential to reduce the cost of solar cell production. The production process of thin-film solar cells consumes less energy, which has the potential to greatly reduce raw material and manufacturing costs; at the same time, thin-film solar cells can still generate electricity under low light conditions. Therefore, the current market demand for thin-film solar cells is gradually increasing, and the technology of manufacturing thin-film solar cells has become a research hotspot in recent years. [0003] ZnO is an N-type direct bandgap semiconductor material with a bandgap Eg of 3.37eV at r...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): C23C16/44C23C16/56B65G15/14C03B35/14
Inventor 吴国发辛科彭侃
Owner HANERGY TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap