Array type smell detecting element based on MEMS (Micro Electro Mechanical System) technology

Abstract

The invention relates to the field of gas sensitive sensors, and in particular relates to an array type smell detecting element based on an MEMS (Micro Electro Mechanical System) technology. The problem that the individuals in the gas sensitive sensor array used by the existing electronic nose are not uniform in response to characteristic drift is solved. The detecting element comprises a semi-conductor substrate, as well as a gas sensitive unit, a temperature sensing unit for detecting the working temperature of the gas sensitive unit, and a heating unit for heating the gas sensitive unit to the needed working temperature, wherein the gas sensitive unit, the temperature sensing unit and the heating unit are obtained by being processed with the MEMS processing technology on the semi-conductor substrate; the gas sensitive unit comprises a plurality of gas sensitive metallic oxide thin films which are arranged in the light of an array; the gas sensitive metallic oxide thin films are different in size parameters but the same in type; and each thin film is provided with two electrodes for connection with data acquisition equipment. The array type smell detecting element is simple in structure and can be realized by being processed with the MEMS technology which is relatively maturely developed; and in addition, the array type smell detecting element is beneficial to the realization of the integration and the miniaturization of the electronic nose and achieves reasonableness in method and correctness in identification.

Description

technical field [0001] The invention relates to the field of gas sensitive sensors, in particular to an array type odor detection element based on MEMS technology. Background technique [0002] The electronic nose is an artificial olfactory system capable of identifying and quantifying target gases. It generally consists of three parts: a gas sensor array, a data acquisition device, and a pattern recognition system. Among them, the gas sensor array consists of multiple material systems, manufacturing processes, and working The same or different sensor configurations (for example: metal oxide semiconductor sensors, mass-type gas sensors, electrochemical gas sensors, surface acoustic wave sensors, etc.), each gas sensor has a response to complex gas The characteristics of being different from each other can obtain the odor information of the test sample more comprehensively, and at the same time identify a variety of odors with the help of data processing methods, and then ana...

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problem of inconsistency of individual response characteristic drift in the gas sensor array used in the existing electronic nose, the present invention proposes an array type odor detection element based on MEMS technology

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