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Layer-by-layer analysis method for surface layer of copper alloy material

An analysis method, copper alloy technology, applied in the field of layer-by-layer analysis of the surface of alloy materials

Active Publication Date: 2013-12-11
GUOBIAO BEIJING TESTING & CERTIFICATION CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

ZL 200920246955.X discloses a glow discharge ion source mass spectrometer interface device, which is composed of a skimmer cone and an ion outlet cone, which are placed between the glow discharge ion source and the ion optical system of the mass spectrometer, which solves the problem of Ion transport problems in two very different environments: low-pressure, glow-discharge plasmas and high-vacuum, ambient-temperature mass spectrometers

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  • Layer-by-layer analysis method for surface layer of copper alloy material
  • Layer-by-layer analysis method for surface layer of copper alloy material

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Experimental program
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Embodiment 1

[0036] The method for analyzing the surface layer of the copper alloy material layer by layer by glow discharge mass spectrometry comprises the following steps:

[0037] (1) Prepare samples for analysis

[0038] An unknown commercially available brass substrate was ground to 9. Further polish to the mirror surface, and grow a thin layer of aluminum bronze film on the substrate surface by radio frequency sputtering deposition method; first use scanning electron microscope analysis technology to calibrate the thickness of the layer of aluminum bronze film, and its thickness is 5.0 μm;

[0039] (2) Select the analysis conditions of the instrument

[0040] Glow discharge ion source conditions: sampling distance is 12mm, sample sputtering spot diameter φ5mm, ion source argon pressure 800Pa, discharge voltage DC 800V;

[0041] Glow discharge ion source mass spectrometer interface conditions: the aperture of ion exit cone 1 is φ6mm, the aperture of skimmer cone 2 is φ0.89mm, and th...

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Abstract

The invention provides a layer-by-layer analysis method for a surface layer of a copper alloy material, comprising the steps of: selecting a glow discharge ion source and a mass spectrum analysis condition to carry out sample treatment and sample analysis; peeling an analyzed sample by utilizing the glow discharge ion source under the action of cathode sputtering; recording a continuous change signal of analyzed sample mass spectrum peak strength along with the time in a high-sensitivity mass spectrometer system in real time; and converting the continuous change signal into change of the chemical composition of the sample along with the depth by using a composition and depth double-calibration method so as to finish the layer-by-layer quantified analysis of the surface layer of an aluminum bronze membrane sample on a brass base material. In the invention, proper analysis parameters such as argon pressure, discharge voltage, sample sputtering spot surface diameter, sample measurement time and the like are selected to improve interlayer resolution to be thousands of nanometers, so that the ultrathin layer-by-layer analysis of the surface layer of bronze on the brass base material is realized.

Description

technical field [0001] The invention relates to a layer-by-layer analysis method for the surface layer of an alloy material, in particular to a layer-by-layer analysis method for the surface layer of a copper alloy material. Background technique [0002] Glow discharge mass spectrometry (GDMS) analysis technology is currently a cutting-edge analysis technology in the field of analytical chemistry, and is recognized by the industry as one of the most effective analysis technologies for trace and ultra-trace element analysis of solid conductive materials. Various departments, colleges and universities, scientific research units have been widely used. [0003] The glow discharge mass spectrometer consists of two parts: a glow discharge ion source and a mass spectrometer. The glow discharge ion source and the mass spectrometer are connected through the glow discharge ion source mass spectrometer interface, so that the working conditions required by the two physical spaces are m...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/68
Inventor 刘湘生刘英潘元海李继东王长华
Owner GUOBIAO BEIJING TESTING & CERTIFICATION CO LTD
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