Reflection ring lifting device for improving thermal field of zone-melting single-crystal furnace

Abstract

The invention relates to manufacturing equipment for non-mental crystals and aims at providing a reflection ring lifting device for improving the thermal field of a zone-melting single-crystal furnace. The reflection ring lifting device comprises a reflection ring and a window flange of a main furnace chamber; an outer side ring of the reflection ring is provided with a hollow cooling pipe; the two ends of the cooling pipe are connected to metal sealing joints on the window flange; the metal sealing joints are extended out of the outer wall of the window flange to be used as a cooling water inlet and outlet; the cooling pipe is fixed at one end of a support which is positioned on a vertical optical shaft; an engaged vertical lifting lead screw is also arranged on the support; and a transmission shaft is connected with the lifting lead screw through a bevel gear pair. The reflection ring lifting device has the advantages of realizing the lifting movement of the reflection ring in a hearth of the zone-melting furnace, being smooth and reliable in movement, being capable of realizing front and back adjustment, being convenient for aligning the reflection ring and a heating coil and being capable of forming a favorable thermal field in a melting zone, thereby increasing the quality of single crystals. By adjusting the position of the reflection ring, the reflection ring has thermal insulation effect on the single crystals, reduces the thermal stress inside the crystals and prevents detects such as flaws and the like from occurring in the single crystals due to undercooling.

Description

technical field [0001] The invention relates to non-metallic crystal manufacturing equipment, in particular to a reflection ring lifting device for improving the thermal field of a zone melting single crystal furnace. Background technique [0002] Silicon material is the foundation of modern information society. It is not only the main functional material of photovoltaic power generation and other industries, but also the basic material of semiconductor industry, especially power electronic devices. The production of single crystal silicon by zone melting method (FZ) is a new type of single crystal growth method different from Czochralski furnace (CZ). It uses high-frequency induction heating coils to partially melt high-purity polycrystalline materials. The melting zone relies on The surface tension of the molten silicon and the magnetic buoyancy provided by the heating coil are in a suspended state, and then the molten silicon is pulled into a single crystal from the botto...

AI Technical Summary

Problems solved by technology

In traditional zone melting furnace equipment, there is generally no reflective ring device or the reflective ring is in a fixed installation form, and the thermal field under the melting zone cannot be adjusted, which makes the quality of grown single crystals not high, which cannot meet the current requirements for high-quality single crystals

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