Polymer film optical fiber F-P cavity-based underwater shock pressure sensor and dynamic calibration experiment system thereof
A technology of pressure sensor and polymer film, which is applied in the direction of fluid pressure measurement, measuring fluid pressure, instruments, etc. using optical methods, can solve problems such as failure to work normally, resistance to electromagnetic interference, etc., and achieve reliability improvement and dynamic matching error small effect
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[0021] 1 Fabrication of underwater shock wave pressure sensor (probe) with polymer film optical fiber F-P cavity
[0022] figure 1Schematic diagram of the structure of the developed polymer film optical fiber F-P cavity shock pressure probe. The sensor is deposited sequentially on the end 3 of the cut conductive fiber, the Ag film with a thickness of 4nm to 8nm (preferably 5nm) constitutes the first reflective film 4 of the F-P cavity, and a parylene film with a thickness of 5um to 50um (preferably 30um) The formed F-P cavity body 5, the second reflective film 6 of the F-P cavity composed of a 20nm-30nm (preferably 20nm) thick Ag film, and a 3um thick parylene film constitute the entire F-P cavity protective film 7. The sensitive F-P cavity and the guiding fiber are integrated to form a monolithic structure.
[0023] Make:
[0024] ① Form an optical metal reflective film with low reflectivity at the end of the cut optical fiber. At the same time, the metal reflective film s...
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