Recording layer for optical information recording medium, optical information recording medium, and sputtering target
A recording medium and recording layer technology, applied in the field of sputtering targets, can solve the problems of improving recording characteristics and difficulty in obtaining stability
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[0089] Hereinafter, the present invention will be described in more detail by citing examples, but the following examples do not limit the present invention, and can also be appropriately added and changed within the scope of not departing from the purpose of the foregoing and hereinafter, and this is also included in this document. within the technical scope of the invention.
[0090] (1) Production of CD
[0091] As the disk substrate, a polycarbonate substrate (thickness: 1.1mm, diameter: 120mm, track pitch: 0.32μm, groove depth: 25nm) was used, on which In oxide and Pd oxide were formed by DC magnetron sputtering. And various recording layers composed of Ag oxide. The film thickness of the recording layer was 40 nm. The recording layer was formed by multi-component sputtering under simultaneous discharge of three targets (No. 5 and 8 in Table 1 are two targets) of a pure In metal target, a pure Pd metal target, and a pure Ag metal target.
[0092] The sputtering conditi...
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