Preparation method of physical detection sample

Abstract

The invention provides a preparation method of a physical detection sample. The method comprises steps that: a wafer sectioned block is provided, wherein the wafer sectioned block comprises s first physical layer, a second physical layer and a third physical layer which grow sequentially, and a contact surface between the first physical layer and the second physical layer is a surface requiring observation; the first physical layer is stripped, such that the surface requiring observation is exposed, such that the physical detection sample is formed. With the method, the observation surface of the prepared physical detection sample is exposed, such that the observation surface is not obstructed by any physical layer. When the physical detection sample is observed by using a scanning electron microscope, the surface requiring observation can be clearly observed, such that the reliability of the physical detection can be improved.

Description

technical field [0001] The invention relates to an integrated circuit detection process, in particular to a method for preparing a physical detection sample. Background technique [0002] In the production of semiconductor devices, dozens or even hundreds of processes have to go through from the wafer to the final product. In order to ensure that the product has qualified performance, is stable and reliable, and has a high yield rate, according to the production situation of various products, there must be strict specific requirements for all process steps. Therefore, corresponding systems and precise monitoring measures must be established in the production process, starting from the semiconductor process inspection first. [0003] There are many items, contents and methods of semiconductor process testing, which can be roughly divided into two categories. The first category is the inspection of wafers before and after each step of processing or during processing, that is...

AI Technical Summary

Problems solved by technology

[0007] The object of the present invention is to provide a method for preparing a physical detection sample to solve the problem that the physical detection sample prepared by the existing physical detection sample preparation method is not conducive to physical detection

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