High-repetition rate all-solid-state high-voltage pulse generator

Abstract

The invention discloses a high-repetition rate all-solid-state high-voltage pulse generator which comprises a direct current power supply, a resonance charging circuit, an energy storage capacitor, a step-up pulse transformer and a magnetic pulse compression switch circuit, wherein the direct current power supply is connected into the resonance charging circuit after being connected with a filter capacitor in parallel; the resonance charging circuit then is connected with the two ends of the filter capacitor after being connected with the energy storage capacitor; the two ends of a primary coil of the step-up pulse transformer are connected with the two ends of the energy storage capacitor; and a secondary coil of the step-up pulse transformer is connected into the magnetic pulse compression switch circuit. The invention has the beneficial effects that a high-pressure rapid pulse is generated by adopting a method of combining a power semiconductor switch with a magnetic pulse compression switch to replace a thyratron, is used for discharging and exciting a gas laser and can overcome the defects caused by the thyratron; and the running demands of an excimer laser at high repetition rate and long service life are satisfied.

Description

technical field [0001] The invention relates to a high-voltage pulse generator, in particular to a high repetition rate all-solid-state high-voltage pulse generator. Background technique [0002] Discharge-excited excimer lasers are widely used in industrial, medical and scientific research fields. The working characteristics of discharge-excited excimer lasers determine that the pumping system must have a higher power density and a shorter rise time of the excitation pulse. The peak power density of excimer laser pumping such as KrF and ArF is generally on the order of MW / cm3, and the rise time of the excitation pulse is generally less than 150ns. Excimer devices generally use thyristors to release the energy in high-voltage energy storage capacitors to generate rapid discharge excitation. The advantage of the thyratron-based high-voltage pulse generator is that it has a compact structure and a simple main discharge circuit, but its key component, the hydrogen thy...

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Problems solved by technology

[0003] The purpose of the present invention is to provide a high repetition rate all-solid-state high-voltage pulse generator to solve the problem that excimer lasers in the prior art use thyratrons to generate discharge excitation. The residual oscillation of the circuit is large during operation, and it needs warm-up time. After aging, it is easy to misconduct and other defects, which affect the overall performance of the excimer laser.

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