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Method for manufacturing ultra-stable ultra-high-fineness micro-optical cavity

A production method and fineness technology, which is applied in the field of micro-optical cavity, can solve the problems of low fineness of micro-optical cavity and cannot meet the measurement requirements, and achieve the effect of reducing interference

Inactive Publication Date: 2012-04-25
SHANXI UNIV
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Problems solved by technology

[0004] The present invention is to solve the problem that the existing micro-optical cavity has low fineness and cannot meet the measurement requirements, and provides a method for manufacturing an ultra-stable ultra-high-precision micro-optical cavity

Method used

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  • Method for manufacturing ultra-stable ultra-high-fineness micro-optical cavity
  • Method for manufacturing ultra-stable ultra-high-fineness micro-optical cavity
  • Method for manufacturing ultra-stable ultra-high-fineness micro-optical cavity

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Embodiment Construction

[0027] A method for manufacturing an ultra-stable ultra-high-precision micro-optical cavity includes the following steps:

[0028] (1) Use a biological microscope to select two pieces of the first lens 7, the second lens 8, and the first lens 7, the second lens 8 with intact film, no stains, no scratches, no pits, and reflectance greater than 99.999%. The end of the reflecting surface is tapered; the dust on the surface of the first lens 7 and the second lens 8 is removed;

[0029] (2) Construct an air purification device for making a micro-optical cavity. The air purification device includes an air pump 1, a first sealed jar 2, a second sealed jar 3, and a third sealed jar in sequence 4; The first sealed jar 2 and the second sealed jar 3 are filled with water, and the third sealed jar is filled with desiccant 5; the third sealed jar 4 is connected to the closed operating space 6 and is airtight The operation space 6 has an air outlet;

[0030] (3) In a closed operating space 6, us...

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Abstract

The invention relates to a micro-optical cavity, in particular to a method for manufacturing an ultra-stable ultra-high-fineness micro-optical cavity, which solves the problem that the traditional micro-optical cavity cannot meet the measurement requirements due to lower fineness. The method for manufacturing the ultra-stable ultra-high-fineness micro-optical cavity comprises the following steps of: selecting two lenses; constructing an air purifying device connected with a closed operation space; bonding the two lenses with two flaky piezoelectric ceramics together to form the micro-optical cavity; calculating cavity length and fineness of the micro-optical cavity; and placing the micro-optical cavity in a vacuum gas chamber and maintaining vacuum degree to be 10-80Pa. The fineness of the optical cavity manufactured by the manufacturing method disclosed by the invention can reach 330,000 so that the ultra-stable ultra-high-fineness micro-optical cavity can be widely suitable for use in the fields of environment monitoring, material analysis, biological medicine, food sanitation, safety production and information technology.

Description

Technical field [0001] The invention relates to a micro-optical cavity, in particular to a manufacturing method of an ultra-stable and ultra-high-precision micro-optical cavity. Background technique [0002] Optical cavity is one of the indispensable tools for modern optical testing, optical metrology and optical analysis, and general optical experiments. From laser generation, laser mode detection, mode selection to various effects of cavity enhancement, optical cavities are used more and more. Wide range; among them, the ultra-stable ultra-high-precision micro-optical cavity occupies an important position in the current high-precision measurement, weak signal detection, photoelectric engineering technology and cutting-edge scientific research due to its extremely high fineness and extremely small film volume . With the development of technology and actual needs, the highly reflective multilayer dielectric film technology can currently achieve 1-R=1.6ppm, and theoretically it c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S3/08
Inventor 张鹏飞李刚张天才
Owner SHANXI UNIV
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