Device for controlling and analyzing PI (Physik Instrumente) micropositioner

Abstract

The invention discloses a device for controlling and analyzing a PI (Physik Instrumente) micropositioner, and the device is mainly used for a subsystem of a nano-positioning workpiece table. An upper computer takes port data as the control input of the PI micropositioner, and the port data is sent to a port data receiving and sending module to be processed; a data processing module in the device converts ASCII (American Standard Code for Information Interchange) Command data flow in the port data into GCS (Gate Control and Sequencing Computer) Command data flow which can be identified by the PI micropositioner; the GCS Command data flow is sent to the PI micropositioner by a serial port data receiving and sending module; the serial port data receiving and sending module in the device is in charge of receiving the feedback data of the PI micropositioner; the GCS Command data flow is converted into the ASCII Command data flow by a data analysis module; and after the port data receiving and sending module packages the analyzed data according to a specified format again, the data is sent to the upper computer. The device is integrated in the original control circuit, and the control link of the PI micropositioner is simplified on the premise that the original control function is not affected, therefore the subsystem of a nano-positioning workpiece table has the advantages of more compact structure, more reliable performance and stronger instantaneity.

Description

technical field [0001] The invention relates to the technical field of special equipment for microelectronics, in particular to a device for controlling and analyzing a PI micro-motion stage, which is used in a nano-positioning workpiece stage subsystem in a photolithography machine. Background technique [0002] The workpiece table technology is one of the key technologies to realize the overall performance of the lithography machine. Its motion accuracy, stroke and speed determine the resolution and yield of the final product. At present, there are two main design ideas for the design scheme of large-stroke and ultra-precision workbenches: one is the single-stage feed method, which adopts linear motor non-contact feed or uses static friction to drive the feed; the other is the two-stage feed method, that is, adopts The way of combining coarse motion system and micro motion system. The system involved in the present invention adopts a workpiece table structure combining a ...

AI Technical Summary

Problems solved by technology

Its disadvantage is that it is necessary to establish a separate communication circuit to connect the micro-motion platform and the host computer (PC or industrial computer), and the information of the micro-motion platform cannot be obtained by other nodes in the system in real time, and must be forwarded by the host computer to other subsystems , affecting the real-time

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