Supporting substrate, bonding substrate, method for manufacturing supporting substrate, and method for manufacturing bonding substrate
A technology of supporting substrate and manufacturing method, which is applied in the fields of supporting substrate, bonding substrate, manufacturing of supporting substrate and manufacturing of bonding substrate, can solve the problems of inability to obtain bonding strength, inability to be close to bonding surface, etc.
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[0023] Next, the supporting substrate, the bonded substrate, the manufacturing method of the supporting substrate, and the manufacturing method of the bonded substrate of the present invention will be described with reference to the drawings. Specifically, (1) the overall structure of the bonded substrate, (2) the detailed structure of the supporting substrate, (3) the manufacturing method of the supporting substrate, (4) the manufacturing method of the bonded substrate, (5) comparative evaluation, ( 6) Action-Effect, (7) Other embodiments will be described.
[0024] In addition, in the following description of drawings, the same code|symbol is attached|subjected to the same part. However, the drawings are schematic diagrams, and it should be noted that ratios of dimensions and the like may differ from actual ratios of dimensions.
[0025] Therefore, specific dimensions and the like should be judged with reference to the following description. In addition, of course, the par...
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