Array type flexible force sensor

Abstract

The invention relates to an array type flexible force sensor, which comprises an upper insulation protecting layer, a parallel metal row electrode graphically arranged on the lower surface of the upper insulation protecting layer, a lower insulation protecting layer, a parallel metal column electrode graphically arranged on the upper surface of the lower insulation protecting layer, and a first sensitive membrane layer positioned between the row electrode and the column electrode, wherein the first sensitive membrane layer consists of a filling type sensitive material layer and a filling typesensitive material convex strip or convex block adhered onto the upper surface of the filling type sensitive material layer, and the longitudinal section of the convex strip or convex block is in a wedge, conical or serrated shape; the convex strip or convex block is vertically aligned with the column electrode, and the row electrode and the column electrode are distributed in a spatial vertical intersection way; a spatial vertical intersection part and the first sensitive membrane layer contained in the spatial vertical intersection part form a force sensing unit, and the filling type sensitive material is a conductive composite material that conductive particles are uniformly dispersed in a flexible insulation matrix material. The array type flexible force sensor has the advantages of high sensitivity, stable performances, long service life and the like.

Description

technical field [0001] The invention belongs to the technical field of micro-electromechanical systems (MEMS) and sensing, and in particular relates to an array type flexible force-sensitive sensor. Background technique [0002] Because of its good flexibility, the flexible sensor is not limited by the shape of the object to be measured, and can be attached to various regular or irregular surfaces to realize the sensing function. The flexible force sensor is mainly used in the measurement of extrusion force and shear force, and can be used as a tactile sensor. Common flexible force sensors include piezoresistive, capacitive and optical. [0003] Because of the advantages of good flexibility, large measurement range and effective measurement area, and relatively simple process, the use of pressure-sensitive conductive rubber to make piezoresistive flexible force-sensitive sensors has gradually become the mainstream design idea. According to the working principle, it is main...

AI Technical Summary

Problems solved by technology

Although the performance of the former is stable, the piezoresistive coefficient is often limited by the characteristics of the sensitive material itself (such as 200810018554.9); although the latter has a large sensitivity coefficient, the difference in the initial resistance of the sensor is relatively small due to the difficulty in controlling the roughness of the contact surface of the sensitive material. Large, and the surface microscopic morphology is easily damaged by pressure, resulting in low sensor life (such as Tekscan, 2001, patent number: US 6,272,936, B1)

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