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Method and apparatus for generating coherent extreme ultraviolet radiation

A technology of extreme ultraviolet radiation and extreme ultraviolet, applied in the field of optics, can solve the problems of high cost and complex structure

Inactive Publication Date: 2011-11-02
CHANGCHUN UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The threshold light field strength that higher harmonics can produce is about 10 13 W / cm 2 (see X.F.Li et al., Physical Review A, 39, 5751-5761, 1989), the general method of using high-order harmonics to generate extreme ultraviolet radiation is to use a femtosecond laser amplification system with a complex structure and high cost

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Embodiment Construction

[0009] (1) Processing nanostructures, such as figure 1 As shown, the triangular antenna structure (bow-tie structure) is adopted, the material is gold, the height of the isosceles triangle is 120-180nm, the apex angle is 20-45°, the thickness is 30-60nm, and the distance between the vertices of the two triangles is 20-180nm. 50nm. Such as figure 2 As shown, the nano-antenna array structure was prepared on the sapphire substrate by electron beam lithography. The sapphire substrate is polished on both sides, the thickness is 300-500 μm, and the side length is preferably 1-2 cm. The contact surface between the sapphire and the gold nanostructure 6 is plated with chromium, and the thickness of the chromium is 5-10 nm. In the process of preparing the nanostructure, the size of the field of view may be 100 μm, and the number of fields of view may be set as required.

[0010] (2) The present invention presses image 3 The structure shown is implemented, and the structural device...

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Abstract

The invention, which belongs to the optical technological field, relates to a method and an apparatus for generating coherent extreme ultraviolet radiation. According to the invention, extreme ultraviolet radiation is generated by utilizing a higher harmonic method and a femtosecond laser amplifier that has a complicated structure with high cost is employ for realizing the generation of the extreme ultraviolet radiation. The method depends on the femtosecond laser amplifier. According to the method and the apparatus provided in the invention, a femtosecond laser oscillator is employed; a focusing laser beam is utilized to irradiate a gold nanoarray structure in a vacuum chamber and a composite target composed of inert gas; and resonance of surface plasmons enable field density of an incident light to be improved substantially, so that a field density threshold for generating higher harmonic of an extreme ultraviolet wave band; therefore, the femtosecond laser amplifier can obtain coherent extreme ultraviolet radiation, so that equipment generated by the higher harmonic becomes simple and compact. The apparatus provided in the invention has a simple structure; the working frequency of the obtained higher harmonic of the extreme ultraviolet wave band can reach 70-80 MHz; such a new light source is in favor of improvement of a photon flow of the light source.

Description

technical field [0001] The invention belongs to the field of optical technology, and relates to a method and a device for generating coherent extreme ultraviolet radiation by using resonant surface plasmons to increase the light field. Background technique [0002] Extreme ultraviolet radiation has important applications in extreme ultraviolet microscopy, extreme ultraviolet lithography, spectral research, material analysis, etc. EUV radiation can be obtained using synchrotron radiation, laser (discharge) plasma and higher harmonic methods. However, in the synchrotron radiation method, the equipment is huge and expensive, while in the laser (discharge) plasma method, a large amount of target debris is produced during the operation of the light source, which pollutes the optical system. The high-order harmonic is an excellent extreme ultraviolet light source, which has the advantages of small size, cleanliness, ultrashort spectrum detection, and high spatial and temporal coh...

Claims

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Application Information

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IPC IPC(8): H05G2/00
Inventor 林景全雷建国高勋厉宝增
Owner CHANGCHUN UNIV OF SCI & TECH
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