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Method for preparing miniature thermocouple probe of scanning thermal microscopy

A technology of scanning thermal microscope and thermocouple, which is applied in the field of nanometer sensors and nanometers to achieve the effect of simple process and low equipment dependence

Inactive Publication Date: 2011-09-07
PEKING UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the only specific method reported in the literature also uses semiconductor processes such as reactive ion etching, which still does not get rid of the disadvantages of complicated process and expensive instruments.

Method used

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  • Method for preparing miniature thermocouple probe of scanning thermal microscopy
  • Method for preparing miniature thermocouple probe of scanning thermal microscopy
  • Method for preparing miniature thermocouple probe of scanning thermal microscopy

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Embodiment Construction

[0035] The present invention will be further described below through specific embodiments in conjunction with the accompanying drawings, but the present invention is not limited in any way.

[0036] In this example, the commercialized AFM contact mode silicon nitride tip is used, and titanium and palladium are selected as the two metal layer materials of the thermocouple to make a miniature thermocouple probe suitable for the cantilever mount of the VEECO D-3100 AFM instrument. ,Specific steps are as follows.

[0037] (a) Select the AFM cantilever needle tip (model DNP-20, VEECO, USA) that is conveniently available on the market ( figure 1 ), and a miniature thermocouple was prepared on the tip of one of the V-shaped cantilever needles. figure 2 It is a schematic diagram of the process of making a thermocouple. In order to simplify the expression, only one of the four needle points is actually drawn (such as figure 2 shown in a). In steps a and c, the metals used are sele...

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Abstract

The invention discloses a method for preparing a miniature thermocouple probe of a scanning thermal microscopy, which belongs to the technical fields of nano machining, nanoscale performance measurement and electronic science. The method for preparing the miniature thermocouple probe of the scanning thermal microscopy comprises the following steps of: a) manufacturing a first metal layer on the front of a cantilever pinpoint of an atomic force microscopy; b) manufacturing an insulating layer on the first metal layer; c) removing the insulating layer in a set area on the tip of the pinpoint; and d) manufacturing a second metal layer on the insulating layer, wherein the second metal layer is in contact with the first metal layer in the set area, and is made from a material different from that of the first metal layer. The method can be used for the technical fields of nano machining, nanoscale performance measurement and the like.

Description

technical field [0001] The invention relates to a nanometer sensor and a nanometer measuring instrument, in particular to a method for manufacturing a nanoscale thermal sensor on a commercial AFM cantilever tip, and belongs to the fields of nanoscale processing, nanoscale performance measurement and electronic science and technology. Background technique [0002] So far, many low-dimensional materials with characteristic scales below 100 nanometers have been manufactured, such as carbon nanotubes, nanowires of various metals or semiconductors, graphene, etc. At the same time, with the continuous improvement of the manufacturing process of large-scale integrated circuits, the feature size of traditional devices has also been reduced to the order of tens of nanometers. The study of electron, phonon transport and energy dissipation of these nanomaterials and nanodevices is a significant and very challenging topic. For example, the study of heat distribution and dissipation of l...

Claims

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Application Information

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IPC IPC(8): G01Q60/58
Inventor 陈清高崧李思然
Owner PEKING UNIV
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