Constant volume type accurate automatic liquid replenishing device
An automatic rehydration device and fixed-volume technology, which is applied to the cleaning method of using liquid, sustainable manufacturing/processing, climate sustainability, etc., can solve the problems that the accuracy of rehydration is greatly affected by human factors and the amount of rehydration is inaccurate, etc. Achieve the effect of keeping the solution concentration stable, ensuring the cleaning quality and improving the use efficiency
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[0010] Described a kind of constant volume type precision automatic replenishment device, such as figure 1 As shown, it includes a liquid storage tank 1, a mechanical replenishment pump 2, a calibration tank 3, an upper liquid level sensor 4, a lower liquid level sensor 5, a float 6, a U-shaped float rod 7, a constant volume sensor 8, and a scale 9 , an electromagnetic reversing valve 10, a cleaning tank 11 and a control system 12. The liquid storage tank 1 is arranged next to the automatic silicon wafer cleaning machine, and the solution to be replenished is stored in the liquid storage tank 1, and a liquid filling opening is arranged on the top of the liquid storage tank 1 , for the operator to add solution to it, the mechanical replenishment pump 2 is set between the liquid storage tank 1 and the calibration tank 3, and the upper liquid level sensor 4 and the lower liquid level sensor 5 are arranged on the side wall of the calibration tank 3 , the liquid replenishment pipe ...
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