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Shielding baffle plate mechanism used for vertical multi-target vacuum coating machine

A technology of vacuum coating machine and baffle mechanism, which is applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., to achieve the effects of reducing manufacturing cost, flexible operation and wide application range

Inactive Publication Date: 2011-06-01
NORTHEASTERN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] At present, vertical multi-target vacuum coating machines seldom use the shielding structure facing the coating target. The industry still lacks a shielding baffle product or technical method with a simple structure, convenient operation, and flexible functions, and further research and development are urgently needed.

Method used

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  • Shielding baffle plate mechanism used for vertical multi-target vacuum coating machine
  • Shielding baffle plate mechanism used for vertical multi-target vacuum coating machine
  • Shielding baffle plate mechanism used for vertical multi-target vacuum coating machine

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Embodiment Construction

[0032] The present invention will be further described below in conjunction with drawings and embodiments.

[0033] The composition of this embodiment is as figure 1 with figure 2 As shown: a cylindrical vertical vacuum coating machine, on the circumference of the vacuum chamber side wall 51, 6 coating target sources 59, 60, 61, 62, 63, 64 are evenly distributed; the shielding block of the embodiment of the present invention The design of the plate mechanism adopts 5 shielding baffles 34, 35, 36, 37, 38, at least one coating target position is shielded during work, and at most 5 target positions are shielded at the same time.

[0034] Relying on the inner ring 4, the first-stage ball cage 6 with the first-stage lower ball 25 is placed on the outer ring plate of the inner ring 4; the first-stage seat ring 50 is set outside the inner ring 4, and the first-stage The inner ring plate of the seat ring 50 is pressed on the first-stage lower ball 25; on the inner ring plate of the...

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Abstract

A shielding baffle plate mechanism used for a vertical multi-target vacuum coating machine comprises multistage seat rings, frame rods, baffle plates, a big gear ring and a driving mechanism. The shielding baffle plate mechanism is characterized in that the number of the baffle plates can be flexibly determined according to needs; the seat rings with the same number are sequentially sleeved from inside to outside and supported with each other by balls; the downside of each stage of seat ring is connected to one baffle plate through the frame rods; each stage of frame rods are arranged at different heights and angles so as to avoid interference; locating pins or limiting pins below the adjacent seat rings of inner sides can be poked by the baffle plate below each stage of seat ring and are driven to rotate forwardly and reversely; and the big gear ring is fixed by the outermost seat ring which is engaged with a driving wheel. Through accurately controlling the alternate forward and reverse rotation angles of the unique driving wheel, the baffle plates of each stage can be arranged at specified shielding positions so as to realize the condition that the baffle plates shield various possible position combination modes. The invention provides a key part structure with the advantages of comprehensive shielding function, flexible and reasonable structure and convenient and quick operation for a vacuum coating technology.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating, in particular to a shielding baffle mechanism used in a vertical multi-target vacuum sputtering (or ion) coating machine. Background technique [0002] In modern science and technology and industrial production, vacuum coating technology plays a very important role, especially vacuum sputtering coating and vacuum ion coating, which are extremely widely used physical vapor deposition coating methods. [0003] The vertical multi-target vacuum sputtering (or ion) coating machine is a kind of coating equipment with a wide range of uses. Its structure is usually on the circumferential side wall of the vertical cylindrical or polygonal vacuum chamber, with multiple coating targets distributed. (sputtering target or arc target), some coating machines are also equipped with various radiation heaters on the side walls; a planetary workpiece holder is arranged in the center of the bottom plate of th...

Claims

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Application Information

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IPC IPC(8): C23C14/34
Inventor 张世伟韩进张文慧
Owner NORTHEASTERN UNIV
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