Full digital power adjustable inductance coupling plasma RF (Radio Frequency) light source

Abstract

The invention relates to a full digital power continuously-adjustable inductance coupling plasma RF (Radio Frequency) light source belonging to the field of inorganic analytical instruments. The full digital power continuously-adjustable inductance coupling plasma radio-frequency light source comprises an RF control circuit, a power control circuit, a power source circuit, an RF power generator circuit, a gas circuit control circuit, a directional coupler and a power output circuit, wherein a computer is connected with the RF control circuit by adopting a serial port, sends a control signal and transmits output power as a parameter to the RF control circuit; the control signal is accessed to the power control circuit through the RF control circuit; the power control circuit controls the output voltage of the power source circuit according to the size of the control signal; RF power enters the power output circuit through the directional coupler; and an output power signal enters the power control circuit for closed loop feedback. The invention can realize light source ignition automation and argon control automation and can continuously set the light source output power on software at a range from 650 W to 2000 W, thereby being beneficial to analyzing the chemical compositions of materials with different performances.

Description

technical field [0001] The invention belongs to the field of inorganic analytical instruments and provides a fully digital power adjustable inductively coupled plasma radio frequency light source. For Inductively Coupled Plasma-Atomic Emission Spectrometry (ICP-AES) and Inductively Coupled Plasma-Mass Spectrometry (ICP-MS). Background technique [0002] Inductively coupled plasma RF light source is an extremely important core component in ICP-AES and ICP-MS. Its function is to provide excitation energy for evaporation and atomization to the analytical sample. In spectroscopic analysis, there is no clear boundary between the evaporation, atomization and excitation of the sample, and these processes are carried out almost simultaneously, and this series of processes directly affects the emission of the spectral line and the intensity of the spectral line. Excitation light sources with different powers have different excitation behaviors for various samples and elements. The...

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Problems solved by technology

[0003] At present, the RF light source equipped with domestic ICP-AES has a large gap between the output power and power stability of foreign instruments, resulting in poor stability and accuracy of domestic instrument analysis.

At the same time, there is no commercial ICP-MS instrument in China, and no radio frequency light source suitable for ICP-MS has been reported.

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