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Heating fixture of packaging lineup process and method thereof

A heating method and process technology, which is applied in the manufacture of electrical components, electrical solid devices, semiconductor/solid devices, etc., and can solve the problems of damage to the welding pad 131 and increase the temperature of the chip holder 112, etc.

Inactive Publication Date: 2011-05-11
ASE ASSEMBLY & TEST SHANGHAI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, the design of the heating fixture of the lead frame has the following disadvantages: since the heating block 12 is integrally formed, the chip holder 112 is also increased when the inner pin part 111a is heated. temperature, and jointly heated the bonding pad 131 of the semiconductor chip 13
However, the one-piece design of the heating block 12 of the heating fixture of the substrate is also easy to overheat the solder pads 131 of the semiconductor chip 13 to make them excessively softened, thus causing disadvantages such as damage to the solder pads 131 during wire bonding.

Method used

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  • Heating fixture of packaging lineup process and method thereof
  • Heating fixture of packaging lineup process and method thereof
  • Heating fixture of packaging lineup process and method thereof

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Embodiment Construction

[0030] In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and understandable, the preferred embodiments of the present invention will be specifically cited below, together with the accompanying drawings, for a detailed description as follows:

[0031] The heating jig and method of the package wire bonding process provided by the present invention are mainly used for temporarily carrying and clamping and heating a package carrier such as a lead frame (leadframe) or substrate (substrate) during the wire bonding process, so as to improve the wire bonding process. The quality of the joint.

[0032] Please refer to Figure 3A and 3B As shown, the heating fixture 2 of the packaging and bonding process according to the first embodiment of the present invention mainly includes: a carrying block 21 and a clamping block 22 . The bearing block 21 is made of durable materials such as metal or plastic, such as metal with low speci...

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Abstract

The invention discloses a heating fixture of packaging lineup process and a method thereof, wherein the heating fixture comprises a carrier block and a clamping block; and the clamping block is used for clamping a packaging carrier, so that the packaging carrier is clamped between the carrier block and the clamping block. The clamping block is provided with at least one heating component used forheating a first region of the packaging carrier to a first temperature; and a second region of the packaging carrier has a second temperature, and the second temperature is relatively lower than the first temperature. Therefore, the heating fixture ensures that the hardness of a welding pad of a chip on the second region of the packaging carrier is maintained at a proper preset hardness value so as to improve the combination reliability and combination non-defective rate of a lead and the welding pad; and lineup positions on the first region are warmed, thus the lead is easy to joint.

Description

【Technical field】 [0001] The present invention relates to a heating jig and method for packaging wire bonding process, in particular to a heating jig for temporarily carrying, clamping and heating a packaging carrier during the wire bonding process. and its methods. 【Background technique】 [0002] The semiconductor packaging process is used to provide a packaging structure to protect a semiconductor chip, so that the semiconductor chip can avoid external force impact, dust pollution, moisture or oxidation when it is powered on, so that the packaging structure can be used to improve the reliability of the semiconductor chip and prolong the life of the semiconductor chip. its service life. In the existing manufacturing process of semiconductor packaging, semiconductor wafers are usually obtained first and wafer tests are performed on them. After passing the test, the semiconductor wafers will then be cut into several semiconductor chips, and each semiconductor chip will be bo...

Claims

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Application Information

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IPC IPC(8): H01L21/00H01L21/60H01L21/687
CPCH01L24/78H01L2224/05554H01L2224/05624H01L2224/32245H01L2224/45144H01L2224/45147H01L2224/48091H01L2224/48247H01L2224/49175H01L2224/73265H01L2224/78H01L2224/78301H01L2224/78703H01L2224/85181H01L2224/92247H01L2924/00011H01L2924/01047H01L2924/01322H01L2924/10162H01L2924/15311H01L2924/181H01L2924/00014H01L2924/00H01L2924/00012H01L2924/01005
Inventor 王德峻吕岱烈
Owner ASE ASSEMBLY & TEST SHANGHAI
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