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Micro-cantilever gas sensor and manufacturing method thereof

A technology of gas sensor and micro-cantilever, which is applied in the direction of electrical components, microstructure technology, gaseous chemical plating, etc., can solve the problems of no invention patent application, achieve electrical interconnection and signal output, improve sensitivity, and avoid wet method Effect of Etch and Back Etch Processes

Inactive Publication Date: 2011-01-05
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The main problem restricting the development of this type of sensor at the present stage is the selection and preparation of the sensitive layer material of the micro-cantilever beam. The research on the cantilever beam gas sensor has opened up a new way. This research has not been reported yet, and there is no application for related invention patents.

Method used

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  • Micro-cantilever gas sensor and manufacturing method thereof
  • Micro-cantilever gas sensor and manufacturing method thereof
  • Micro-cantilever gas sensor and manufacturing method thereof

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Embodiment Construction

[0032] The present invention will be further described below in conjunction with accompanying drawing:

[0033] Such as figure 1 , figure 2 As shown, the present invention belongs to a piezoresistive micro-cantilever sensor, which includes a sensing unit 1, and each group of sensing units 1 includes two micro-cantilever beams, which are respectively a measuring cantilever beam 2 and a reference cantilever beam 3; two micro-cantilever beams with matched resistor R 1 and R 2 Form a Wheatstone bridge 4. The measuring cantilever beam 2 and the reference cantilever beam 3 are connected to the adjacent bridge arms of the Wheatstone bridge 4, corresponding to the Rs resistance and the Rr resistance of the bridge 4 respectively. The reference cantilever beam 3 is mainly used to eliminate the influence of noise signals on the measurement results. Depending on the measurement object, different organic / inorganic nanocomposite films can be deposited on the surface of the cantilever ...

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Abstract

The invention discloses a micro-cantilever gas sensor comprising sensing units and is characterized in that each group of sensing units comprises two micro-cantilevers, wherein the two micro-cantilevers can be a measuring cantilever and a reference cantilever, and a Wheaston bridge is formed by the measuring cantilever and the reference cantilever and two matching resistors; the measuring cantilever and the reference cantilever are connected to adjacent bridge arms of the Wheastone bridge, and the surface of the measuring cantilever is provided with a pressure-sensitive layer and an air-sensitive layer; a layer of polyelectrolyte polydiene propyl ammonium chloride film is deposited on the surface of the reference cantilever; and a photosensitive polyimide is used as a sacrifice layer material to connect an upper electrode with a lower electrode of each sensing unit through an inverse-splay window. The sensor has the advantages of simple structure, higher test sensitivity, and has wide application prospect in fields, such as environment monitoring, food safety, military and the like.

Description

technical field [0001] The invention relates to the field of micro-electromechanical system gas sensors and organic-inorganic nanocomposite materials, in particular to a micro-cantilever gas sensor based on organic / inorganic nanocomposite films and a manufacturing method thereof. Background technique [0002] In recent years, gas sensors have been widely used in environmental monitoring, food industry and military fields. Traditional gas detection instruments are bulky and expensive. Therefore, it is imperative to develop miniaturized and integrated gas sensors with high performance. Row. With the rapid development of MEMS technology (Micro Electro-Mechanical System) and its application in the field of sensors, gas sensors based on micro-cantilever beams have become a research focus and difficulty in the field of sensors. The advantage of this type of sensor is that the mass-sensitive effect of the micro-cantilever can be used to detect femtogram-level mass changes. Therefo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/12B81B3/00B81C1/00
Inventor 太惠玲蒋亚东苟君严剑飞
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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