Seeding guidance die for growing silicon crystal by directional solidification method
A technology for growing silicon crystals and directional solidification, which is applied in self-solidification, crystal growth, single crystal growth, etc., to achieve the effects of easy processing, dislocation elimination, and low cost
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Embodiment 1
[0028] Such as figure 2 and image 3 A seeding guide mold 2 shown is processed by graphite material and placed on the bottom of the prior art quartz crucible 1, including a seed crystal container 3 and a seed crystal segment 4. There is a square cylinder in the middle of the seed crystal container 3. The first cavity for placing the seed crystal 5, the cross-sectional area of the first cavity is 10000mm 2 , the height is 30mm, and the cross-sectional shape is square; the seeding section 4 is composed of four blocks connected around the seed crystal container 3, and the surface of each block in contact with the silicon raw material placed in the quartz crucible 1 is a slope surface , the bottom of the slope is in contact with the top of the first cavity, the top of the slope is in contact with the side wall of the quartz crucible 1, and the height between the bottom and top of the slope is 15 mm. image 3 A cross-sectional view of the seed guide die is given in .
[0029]...
Embodiment 2
[0033] Such as Figure 4 As shown, the same method as in Example 1 is adopted, the difference is that in order to better control the temperature gradient for seeding, a cavity is provided inside each block of the seeding segment, so that the position of the seed crystal The temperature difference between the temperature and the temperature around the crucible is larger, so that when the silicon melt is kept superheated, the temperature at the seed crystal is just around the melting point.
Embodiment 3
[0035] Such as Figure 5 As shown, the same method as in Example 2 is adopted, the difference is that in order to better seed the crystal and eliminate dislocations, the shape of the seed crystal container 3 of the seeding guide mold 2 is adjusted, that is, the shape of the seed crystal container 3 A cavity near its top part has a diameter contracted to form a 10mm long neck section, the neck section itself is equal in diameter, but because the neck section has a gradually shrinking diameter, the seed crystal grows through the neck section Dislocations growing from the seed crystal are better eliminated when the channel is elongated.
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