Device and method for measuring modulation transfer function of large-numerical aperture micro objective
A technology of modulating transfer function and microscope objective lens, which is applied in the direction of testing optical performance, etc., to achieve the effect of convenient use, wide working band, and good function expansibility.
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[0030] See attached figure 1 , it is the structural representation of the large numerical aperture microscopic objective lens modulation transfer function measuring device that the present embodiment provides, and this device comprises: collimating objective lens 1, target generator 2, image analyzer 11 and control and data processing system (computer) 14.
[0031] The target generator 2 is used to provide a specific imaging target for the test of the modulation transfer function of the microscope objective lens, which includes a target 3 , a chopper 4 , a filter 5 and an illumination source 6 . Wherein the target 3 is a slit target, which is placed at the focal point of the collimating objective lens 1 for simulating a target located at infinity. The illumination light source 6 is used to illuminate the target, and the output wavelength of the target generator can be changed by changing different filters. The chopper is used to modulate the optical radiation signal emitted ...
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