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Preparation method and device thereof of surface structuration composite coating

A technology of surface structuring and composite coating, applied in the direction of coating, metal material coating process, gaseous chemical plating, etc., can solve the problems such as patents and research papers of surface structuring composite coating that have not yet been seen, and achieve high efficiency Composite coating deposition, innovative ideas, easy-to-control effects

Inactive Publication Date: 2011-11-02
CHINA UNIV OF MINING & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

So far, no patents and research papers have been reported on surface structured composite coatings

Method used

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  • Preparation method and device thereof of surface structuration composite coating
  • Preparation method and device thereof of surface structuration composite coating
  • Preparation method and device thereof of surface structuration composite coating

Examples

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Embodiment 1

[0023] Embodiment 1: The special device used for the preparation method of surface structured composite coating is an ultraviolet pulse laser multifunctional surface treatment system device, and the ultraviolet pulse laser multifunctional surface treatment system device includes a pulse laser module 1-1, a precision scanning module 1- 2 and the environment control module 2-3, the pulse laser module 1-1, the precision scanning module 1-2 and the environment control module 1-3 are sequentially connected.

[0024] The pulsed laser module includes a controller 1 and a pulsed laser 2, the controller 1 and the pulsed laser 2 are connected in sequence, and the pulsed laser module is a commercially available product.

[0025] The precision scanning module includes a mirror 3, a beam expander 4, an X-Y vibrating mirror 5 and a focusing mirror 6, and the mirror 3, a beam expanding mirror 4, the X-Y vibrating mirror 5 and the focusing mirror 6 are sequentially connected, and the X-Y vibra...

Embodiment 2

[0036] Embodiment 2: the present invention is realized according to the following steps: preliminary preparation, surface structuring, composite coating deposition and post-treatment;

[0037] 1. Preliminary preparation: first prepare the samples for surface structured composite coating preparation, reaction gas and establish the ultraviolet pulse laser multifunctional surface treatment system device, and prepare the three major modules required for the establishment of the ultraviolet pulse laser multifunctional surface treatment system device Components, the three major module components are the pulse laser module, the precision scanning module, and the environment control module, which are connected in sequence according to the pulse laser module, precision scan module, and environment control module; the reaction gas uses SiH 4 / NH 3 Combination, the purity is not less than 99.9%; the background gas uses N 2 , the purity is not less than 99%;

[0038] 2. Surface structur...

Embodiment 3

[0043] Embodiment 3: the present invention is realized according to the following steps: preliminary preparation, surface structural treatment, composite coating deposition and post-treatment;

[0044] 1. Preliminary preparation: first prepare the samples for surface structured composite coating preparation, reaction gas and establish the ultraviolet pulse laser multifunctional surface treatment system device, and prepare the three major modules required for the establishment of the ultraviolet pulse laser multifunctional surface treatment system device Components, the three major module components are the pulse laser module, the precision scanning module, and the environment control module, which are connected in sequence according to the pulse laser module, the precision scan module, and the environment control module; the reaction gas uses Si 2 h 6 / O 2 Combination, the purity of the two gases is not less than 99.9%; the background gas uses SF 6 and N 2 mixed gas, the pu...

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Abstract

The invention relates to preparation method and device thereof of a surface structuration composite coating, belonging to a film coating of surface engineering. The special device for the preparation method of the surface structuration composite coating is an ultraviolet pulse laser multifunctional surface treatment system device which comprises a pulse laser module, a precise scanning module andan environment regulating module, wherein the pulse laser module, the precise scanning module and the environment regulating module are sequentially connected. The preparation method comprises the steps of primary preparation, surface structuration processing, composite coating deposition and aftertreatment. The invention has novel concept, convenient machining, high efficiency, simple process, easy control and wide application range, the surface structuration treatment of a material and the deposition of the composite coating can be simultaneously realized by adopting a laser light source, surface structuration treatment can be precisely carried on any material, chemical reaction of multiple gases can be induced, and the deposition of the composite coating can be effectively carried out.

Description

technical field [0001] The invention relates to a thin-film coating for surface engineering, in particular to a method for preparing a surface structured composite coating and a device thereof. Background technique [0002] With the development of science and technology and human society, the service conditions of tribological materials are becoming more and more extreme and complex, which puts forward higher and higher requirements for the wear resistance and anti-friction properties of materials. On the basis of traditional tribological materials, through the research and development of surface engineering technology, surface anti-friction and wear-resistant coatings provide an effective and vital solution and way to optimize the tribological performance of mechanical systems and solve material wear. [0003] Thin film coating is a key symbol of surface engineering independent of material science, heat treatment, electroplating, thermal spraying, etc., and has become an in...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/48
Inventor 杨海峰王延庆李宝林王庆良韩正铜
Owner CHINA UNIV OF MINING & TECH
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